A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler

Tongyao Zhang; Hanwen Wang; Xiuxin Xia; Ning Yan; Xuanzhe Sha; Jinqiang Huang; Kenji Watanabe; Takashi Taniguchi; Mengjian Zhu; Lei Wang; Jiantou Gao; Xilong Liang; Chengbing Qin; Liantuan Xiao; Dongming Sun; Jing Zhang; Zheng Han; Xiaoxi Li

doi:10.1038/s41377-022-00734-7

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A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler

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- A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler
- Light: Science & Applications Vol. 11, Issue 3, Pages: 365-374(2022)
- Affiliations：
  
  1.State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Opto-Electronics, Shanxi University, Taiyuan, 030006, China
  2.Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, 030006, China
  3.Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China
  4.School of Material Science and Engineering, University of Science and Technology of China, Anhui, 230026, China
  5.Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan
  6.International Center for Materials Nanoarchitectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan
  7.College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, 410073, China
  8.The Key Laboratory of Science and Technology on Silicon Devices, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
  9.The University of Chinese Academy of Sciences, Beijing, 100029, China
  10.State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan, 030006, China
- Author bio：
  
  Jiantou Gao (gaojiantou@ime.ac.cn)
  Chengbing Qin (chbqin@sxu.edu.cn)
  Zheng Han (vitto.han@gmail.com)
  Xiaoxi Li (xiaoxili1987@gmail.com)
- Funds：
- DOI：10.1038/s41377-022-00734-7
  CLC：
- Published：31 March 2022，
  
  Published Online：01 March 2022，
  
  Received：07 October 2021，
  
  Revised：25 January 2022，
  
  Accepted：08 February 2022
- Accepted：
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Zhang, T. Y. et al. A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler. Light: Science & Applications, 11, 365-374 (2022).
DOI：

Zhang, T. Y. et al. A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler. Light: Science & Applications, 11, 365-374 (2022). DOI： 10.1038/s41377-022-00734-7.

摘要

Abstract

The nano-opto-electro-mechanical systems (NOEMS) are a class of hybrid solid devices that hold promises in both classical and quantum manipulations of the interplay between one or more degrees of freedom in optical

electrical and mechanical modes. To date

studies of NOEMS using van der Waals (vdW) heterostructures are very limited

although vdW materials are known for emerging phenomena such as spin

valley

and topological physics. Here

we devise a universal method to easily and robustly fabricate vdW heterostructures into an architecture that hosts opto-electro-mechanical couplings in one single device. We demonstrated several functionalities

including nano-mechanical resonator

vacuum channel diodes

and ultrafast thermo-radiator

using monolithically sculpted graphene NOEMS as a platform. Optical readout of electric and magnetic field tuning of mechanical resonance in a CrOCl/graphene vdW NOEMS is further demonstrated. Our results suggest that the introduction of the vdW heterostructure into the NOEMS family will be of particular potential for the development of novel lab-on-a-chip systems.

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