High resolution multispectral spatial light modulators based on tunable Fabry-Perot nanocavities

Shampy Mansha; Parikshit Moitra; Xuewu Xu; Tobias W. W. Mass; Rasna Maruthiyodan Veetil; Xinan Liang; Shi-Qiang Li; Ramón Paniagua-Domínguez; Arseniy I. Kuznetsov

doi:10.1038/s41377-022-00832-6

Go to Nature Website

Your Location：

Home >

Browse articles >

High resolution multispectral spatial light modulators based on tunable Fabry-Perot nanocavities

Articles

- High resolution multispectral spatial light modulators based on tunable Fabry-Perot nanocavities
- Light: Science & Applications Vol. 11, Issue 6, Pages: 1227-1237(2022)
- Affiliations：
  
  Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 138634, Singapore, Singapore
- Author bio：
  
  Ramón. Paniagua-Domínguez (ramon_paniagua@imre.a-star.edu.sg)
  Arseniy I. Kuznetsov (arseniy_kuznetsov@imre.a-star.edu.sg)
- Funds：
- DOI：10.1038/s41377-022-00832-6
  CLC：
- Published：30 June 2022，
  
  Published Online：17 May 2022，
  
  Received：21 November 2021，
  
  Revised：11 April 2022，
  
  Accepted：29 April 2022
- Accepted：
Scan QR Code
Mansha, S. et al. High resolution multispectral spatial light modulators based on tunable Fabry-Perot nanocavities. Light: Science & Applications, 11, 1227-1237 (2022).
DOI：

Mansha, S. et al. High resolution multispectral spatial light modulators based on tunable Fabry-Perot nanocavities. Light: Science & Applications, 11, 1227-1237 (2022). DOI： 10.1038/s41377-022-00832-6.

摘要

Abstract

Spatial light modulators (SLMs) are the most relevant technology for dynamic wavefront manipulation. They find diverse applications ranging from novel displays to optical and quantum communications. Among commercial SLMs for phase modulation

Liquid Crystal on Silicon (LCoS) offers the smallest pixel size and

thus

the most precise phase mapping and largest field of view (FOV). Further pixel miniaturization

however

is not possible in these devices due to inter-pixel cross-talks

which follow from the high driving voltages needed to modulate the thick liquid crystal (LC) cells that are necessary for full phase control. Newly introduced metasurface-based SLMs provide means for pixel miniaturization by modulating the phase via resonance tuning. These devices

however

are intrinsically monochromatic

limiting their use in applications requiring multi-wavelength operation. Here

we introduce a novel design allowing small pixel and multi-spectral operation. Based on LC-tunable Fabry-Perot nanocavities engineered to support multiple resonances across the visible range (including red

green and blue wavelengths)

our design provides continuous 2π phase modulation with high reflectance at each of the operating wavelengths. Experimentally

we realize a device with 96 pixels (~1 μm pitch) that can be individually addressed by electrical biases. Using it

we first demonstrate multi-spectral programmable beam steering with FOV~18° and absolute efficiencies exceeding 40%. Then

we reprogram the device to achieve multi-spectral lensing with tunable focal distance and efficiencies ~27%. Our design paves the way towards a new class of SLM for future applications in displays

optical computing and beyond.

关键词

Keywords

references

Zhang, Z. C., You, Z.&Chu, D. P. Fundamentals of phase-only liquid crystal on silicon (LCOS) devices.Light. : Sci. Appl.3, e213 (2014)..

Lazarev, G. et al. Beyond the display: Phase-only liquid crystal on Silicon devices and their applications in photonics [Invited].Opt. Express27, 16206–16249 (2019)..

Savage, N. Digital spatial light modulators.Nat. Photonics3, 170–172 (2009)..

Neff, J. A., Athale, R. A.&Lee, S. H. Two-dimensional spatial light modulators: A tutorial.Proc. IEEE78, 826–855 (1990)..

Grilli, S. et al. Whole optical wavefields reconstruction by digital holography.Opt. Express9, 294–302 (2001)..

Yang, D. K.&Wu, S. T. Fundamentals of Liquid Crystal Devices. 2nd edn (Chichester: John Wiley&Sons, Ltd., 2014).

Linnenberger, A., Serati, S.&Stockley, J. Advances in optical phased array technology. Proceedings of SPIE 6304, Free-Space Laser Communications VI. San Diego: SPIE, 2006, 63040 T.

Chen, H. M. P. et al. Pursuing high quality phase-only liquid crystal on silicon (LCoS) devices.Appl. Sci.8, 2323 (2018)..

Shirmanesh, G. K. et al. Electro-optically tunable multifunctional metasurfaces.ACS Nano.14, 6912–6920 (2020)..

Li, S. Q. et al. Phase-only transmissive spatial light modulator based on tunable dielectric metasurface.Science364, 1087–1090 (2019)..

Kuznetsov, A. I. et al. Optically resonant dielectric nanostructures.Science354, aag2472 (2016)..

Paniagua-Domínguez, R. et al. A metalens with a near-unity numerical aperture.Nano Lett.18, 2124–2132 (2018)..

Decker, M. et al. High-efficiency dielectric huygens' surfaces.Adv. Optical Mater.3, 813–820 (2015)..

Yu, Y. F. et al. High-transmission dielectric metasurface with 2π phase control at visible wavelengths.Laser Photonics Rev.9, 412–418 (2015)..

Yang, Y. M. et al. Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation.Nano Lett.14, 1394–1399 (2014)..

Lin, D. M. et al. Dielectric gradient metasurface optical elements.Science345, 298–302 (2014)..

Yu, N. F.&Capasso, F. Flat optics with designer metasurfaces.Nat. Mater.13, 139–150 (2014)..

Ni, X. J., Kildishev, A. V.&Shalaev, V. M. Metasurface holograms for visible light.Nat. Commun.4, 2807 (2013)..

Yu, N. F. et al. Light propagation with phase discontinuities: Generalized laws of reflection and refraction.Science334, 333–337 (2011)..

Kildishev, A. V., Boltasseva, A.&Shalaev, V. M. Planar photonics with metasurfaces.Science339, 1232009 (2013)..

Zheludev, N. I.&Kivshar, Y. S. From metamaterials to metadevices.Nat. Mater.11, 917–924 (2012)..

Arbabi, A. et al. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission.Nat. Nanotechnol.10, 937–943 (2015)..

Shaltout, A. M., Shalaev, V. M.&Brongersma, M. L. Spatiotemporal light control with active metasurfaces.Science364, eaat3100 (2019)..

Paniagua-Domínguez, R., Ha, S. T.&Kuznetsov, A. I. Active and tunable nanophotonics with dielectric nanoantennas.Proc. IEEE108, 749–771 (2020)..

Abdollahramezani, S. et al. Electrically driven reprogrammable phase-change metasurface reaching 80% efficiency.Nat. Commun.13, 1696 (2022)..

Pogrebnyakov, A. V. et al. Reconfigurable near-IR metasurface based on Ge2Sb2Te5phase-change material.Optical Mater. Express8, 2264–2275 (2018)..

Wang, Y. F. et al. Electrical tuning of phase-change antennas and metasurfaces.Nat. Nanotechnol.16, 667–672 (2021)..

Zhang, Y. F. et al. Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material.Nat. Nanotechnol.16, 661–666 (2021)..

Yin, X. H. et al. Beam Switching and bifocal zoom lensing using active plasmonic metasurfaces.Light. : Sci. Appl.6, e17016 (2017)..

Karvounis, A. et al. All-dielectric phase-change reconfigurable metasurface.Appl. Phys. Lett.109, 051103 (2016)..

De Galarreta, C. R. et al. Reconfigurable multilevel control of hybrid all-dielectric phase-change metasurfaces.Optica7, 476–484 (2020)..

Huang, Y. W. et al. Gate-tunable conducting oxide metasurfaces.Nano Lett.16, 5319–5325 (2016)..

Park, J. et al. Electrically tunable epsilon-near-zero (ENZ) metafilm absorbers.Sci. Rep.5, 15754 (2015)..

Park, J. et al. All-solid-state spatial light modulator with independent phase and amplitude control for three-dimensional LiDAR applications.Nat. Nanotechnol.16, 69–76 (2021)..

Yao, Y. et al. Electrically tunable metasurface perfect absorbers for ultrathin mid-infrared optical modulators.Nano Lett.14, 6526–6532 (2014)..

Dabidian, N. et al. Electrical switching of infrared light using graphene integration with plasmonic Fano resonant metasurfaces.ACS Photonics2, 216–227 (2015)..

Sherrott, M. C. et al. Experimental demonstration of>230° phase modulation in gate-tunable graphene-gold reconfigurable mid-infrared metasurfaces.Nano Lett.17, 3027–3034 (2017)..

van de Groep, J. et al. Exciton resonance tuning of an atomically thin lens.Nat. Photonics14, 426–430 (2020)..

Emani, N. K. et al. Electrical modulation of fano resonance in plasmonic nanostructures using graphene.Nano Lett.14, 78–82 (2014)..

Lewi, T. et al. Ultrawide thermo-optic tuning of PbTe meta-atoms.Nano Lett.17, 3940–3945 (2017)..

Makarov, S. et al. Tuning of magnetic optical response in a dielectric nanoparticle by ultrafast photoexcitation of dense electron-hole plasma.Nano Lett.15, 6187–6192 (2015)..

Shcherbakov, M. R. et al. Ultrafast all-optical tuning of direct-gap semiconductor metasurfaces.Nat. Commun.8, 17 (2017)..

Komar, A. et al. Dynamic beam switching by liquid crystal tunable dielectric metasurfaces.ACS Photonics5, 1742–1748 (2018)..

Bohn, J. et al. Active tuning of spontaneous emission by mie-resonant dielectric metasurfaces.Nano Lett.18, 3461–3465 (2018)..

Komar, A. et al. Electrically tunable all-dielectric optical metasurfaces based on liquid crystals.Appl. Phys. Lett.110, 071109 (2017)..

Hu, Y. Q. et al. Electrically tunable multifunctional polarization-dependent metasurfaces integrated with liquid crystals in the visible region.Nano Lett.21, 4554–4562 (2021)..

Zou, C. J. et al. Multiresponsive dielectric metasurfaces.ACS Photonics6, 1775–1783 (2021)..

Yang, Z. W. et al. Phase-only tuning of extreme huygens metasurfaces enabled by optical anisotropy.Adv. Optical Mater.10, 2101893 (2022)..

Leitis, A. et al. All-dielectric programmable huygens' metasurfaces.Adv. Optical Mater.30, 1910259 (2020)..

Patel, J. S. et al. Electrically tunable optical filter for infrared wavelength using liquid crystals in a Fabry-Perot étalon.Appl. Phys. Lett.57, 1718–1720 (1990)..

Isaacs, S., Placido, F.&Abdulhalim, I. Investigation of liquid crystal Fabry–Perot tunable filters: design, fabrication, and polarization independence.Appl. Opt.53, H91–H101 (2014)..

Isaacs, S., Placido, F.&Abdulhalim, I. Fiber-coupled polarization independent liquid crystal Fabry–Perot tunable filter.Optical Eng.53, 047101 (2014)..

Wang, Z. Y. et al. Compact tunable mid-infrared Fabry-Pérot filters actuated by liquid crystal elastomers.J. Micromech. Microeng.30, 075002 (2020)..

Schwider, J. et al. Digital wave-front measuring interferometry: some systematic error sources.Appl. Opt.22, 3421–3432 (1983)..

Hariharan, P., Oreb, B. F.&Eiju, T. Digital phase-shifting interferometry: A simple error-compensating phase calculation algorithm.Appl. Opt.26, 2504–2506 (1987)..

Steven G. Johnson, The NLopt nonlinear-optimization package,http://github.com/stevengj/nlopthttp://github.com/stevengj/nlopt.

Jones, D. R., Perttunen, C. D.&Stuckman, B. E. Lipschitzian optimization without the lipschitz constant.J. Optim. Theory Appl.79, 157–181 (1993)..

Gablonsky, J. M.&Kelley, C. T. A locally-biased form of the DIRECT algorithm.J. Glob. Optim.21, 27–37 (2001)..

Powell, M. J. D. A direct search optimization method that models the objective and constraint functions by linear interpolation. In Advances in Optimization and Numerical Analysis (eds Gomez, S.&Hennart, J. P. ) (Dordrecht: Springer, 1994), 51–67.

Powell, M. J. D. Direct search algorithms for optimization calculations.Acta. Numerica.7, 287–336 (1998)..

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

⁰