Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds

Jiao Geng; Wei Yan; Liping Shi; Min Qiu

doi:10.1038/s41377-022-00883-9

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Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds

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- Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds
- Light: Science & Applications Vol. 11, Issue 7, Pages: 1607-1614(2022)
- Affiliations：
  
  1.Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou, 310024, Zhejiang Province, China
  2.Institute of Advanced Technology, Westlake Institute for Advanced Study, 18 Shilongshan Road, Hangzhou, 310024, Zhejiang Province, China
- Author bio：
  
  Liping Shi (shiliping@westlake.edu.cn)
  Min Qiu (qiumin@westlake.edu.cn)
- Funds：
- DOI：10.1038/s41377-022-00883-9
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Geng, J. et al. Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds. Light: Science & Applications, 11, 1607-1614 (2022).
DOI：

Geng, J. et al. Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds. Light: Science & Applications, 11, 1607-1614 (2022). DOI： 10.1038/s41377-022-00883-9.

摘要

Abstract

It is always a great challenge to bridge the nano- and macro-worlds in nanoscience, for instance, manufacturing uniform nanogratings on a whole wafer in seconds instead of hours even days. Here, we demonstrate a single-step while extremely high-throughput femtosecond laser scanning technique to obtain wafer-scale, highly regular nanogratings on semiconductor-on-metal thin films. Our technique takes advantage of long-range surface plasmons-laser interference, which is regulated by a self-initiated seed. By controlling the scanning speed, two types of nanogratings are readily manufactured, which are produced by either oxidation or ablation. We achieve a record manufacturing speed (,>, 1 cm,2, s,−1,), with tunable periodicity of ,Λ,<, 1 µm. The fractional variation of their periodicity is evaluated to be as low as ∆,Λ,/,Λ, ≈ 0.5%. Furthermore, by utilizing the semiconductor-on-metal film-endowed interference effects, an extremely high energy efficiency is achieved via suppressing light reflection during femtosecond laser nano-processing. As the fabricated nanogratings exhibit multi-functionality, we exemplify their practical applications in highly sensitive refractive index sensing, vivid structural colors, and durable superhydrophilicity.

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