Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror

Xuejun Zhang; Haixiang Hu; Xiaokun Wang; Xiao Luo; Ge Zhang; Wenxing Zhao; Xiaoyi Wang; Zhenyu Liu; Ling Xiong; Erhui Qi; Congcong Cui; Yanchao Wang; Yingjie Li; Xu Wang; Longxiang Li; Yang Bai; Qiang Cheng; Zhiyu Zhang; Ruigang Li; Wa Tang; Xuefeng Zeng; Weijie Deng; Feng Zhang

doi:10.1038/s41377-022-00994-3

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Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror

Original Articles

- Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror
- Light: Science & Applications Vol. 11, Issue 12, Pages: 2873-2885(2022)
- Affiliations：
  
  1.Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 130033 Changchun, Jilin, China
  2.University of Chinese Academy of Sciences, 100049 Beijing, China
- Author bio：
  
  Xuejun Zhang (zxj@ciomp.ac.cn)
- Funds：
- DOI：10.1038/s41377-022-00994-3
  CLC：
- Published：31 December 2022，
  
  Published Online：26 October 2022，
  
  Received：07 July 2022，
  
  Revised：20 September 2022，
  
  Accepted：26 September 2022
- Accepted：
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Zhang, X. J. et al. Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror. Light: Science & Applications, 11, 2873-2885 (2022).
DOI：

Zhang, X. J. et al. Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror. Light: Science & Applications, 11, 2873-2885 (2022). DOI： 10.1038/s41377-022-00994-3.

摘要

Abstract

In the process of manufacturing the world's largest silicon carbide (SiC) aspheric mirror

the primary difficulties are mirror blank preparation

asphere fabrication

and testing

as well as cladding and coating. Specifically

the challenges include the homogeneity of the complicated structure casting

accuracy and efficiency of the fabrication process

print-through effect

fidelity and precision of test procedure

stress and denseness of cladding process

the dynamic range of interferometric measurement

and air turbulence error due to the long optical path. To break through such a barrier of difficulties

we proposed the water-soluble room temperature vanishing mold and gel casting technology

homogeneous microstructure reaction-formed joint technology

nano-accuracy efficient compound fabrication

gravity unloading technology

high-denseness low-defect physical vapor deposition (PVD) Si-cladding technology

test data fusion method

and time-domain averaging method

etc. Based on the proposed technologies and methods

we have accomplished the world's largest SiC aspheric mirror with a size of ø4.03 m. The impressive performance of the SiC aspheric mirror is validated by the characteristics of the fabricated SiC aspheric mirror. The aerial density of the SiC blank is less than 120 kg/m

surface shape test accuracy is better than 6 nm RMS

thickness inhomogeneity of the cladding layer is less than 5%

and the final surface figure error and roughness are 15.2 nm RMS and 0.8 nm RMS

respectively.

关键词

Keywords

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