
1.Quantum Optoelectronics Group, Institute of Quantum Electronics, ETH Zürich, 8093, Zürich, Switzerland
2.Istituto di Fotonica e Nanotecnologie, CNR, Via del Fosso del Cavaliere 100, 00133, Rome, Italy
Urban Senica (usenica@phys.ethz.ch)
Giacomo Scalari (scalari@phys.ethz.ch)
Published:31 December 2022,
Published Online:24 December 2022,
Received:13 July 2022,
Revised:04 November 2022,
Accepted:26 November 2022
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Senica, U. et al. Planarized THz quantum cascade lasers for broadband coherent photonics. Light: Science & Applications, 11, 3098-3108 (2022).
Senica, U. et al. Planarized THz quantum cascade lasers for broadband coherent photonics. Light: Science & Applications, 11, 3098-3108 (2022). DOI: 10.1038/s41377-022-01058-2.
Recently
there has been a growing interest in integrated THz photonics for various applications in communications
spectroscopy and sensing. We present a new integrated photonic platform based on active and passive elements integrated in a double-metal
high-confinement waveguide layout planarized with a low-loss polymer. An extended top metallization keeps waveguide losses low while improving dispersion
thermal and RF properties
as it enables to decouple the design of THz and microwave cavities. Free-running on-chip quantum cascade laser combs spanning 800 GHz
harmonic states with over 1.1 THz bandwidth and RF-injected broadband incoherent states spanning over nearly 1.6 THz are observed using a homogeneous quantum-cascade active core. With a strong external RF drive
actively mode-locked pulses as short as 4.4 ps can be produced
as measured by SWIFTS. We demonstrate as well passive waveguides with low insertion loss
enabling the tuning of the laser cavity boundary conditions and the co-integration of active and passive elements on the same THz photonic chip.
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