
1.Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Korea
2.Korea Research Institute of Standards and Science (KRISS), Daejeon, 34113, Korea
Jungwon Kim (jungwon.kim@kaist.ac.kr)
Published:28 February 2023,
Published Online:15 February 2023,
Received:9 August 2022,
Revised:16 December 2022,
Accepted:9 January 2023
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No, Y. J. et al. Massively parallel electro-optic sampling of space-encoded optical pulses for ultrafast multi-dimensional imaging. Light: Science & Applications, 12, 304-313 (2023).
No, Y. J. et al. Massively parallel electro-optic sampling of space-encoded optical pulses for ultrafast multi-dimensional imaging. Light: Science & Applications, 12, 304-313 (2023). DOI: 10.1038/s41377-023-01077-7.
High-speed and high-resolution imaging of surface profiles is critical for the investigation of various structures and mechanical dynamics of micro- and nano-scale devices. In particular
recent emergence of various nonlinear
transient and complex mechanical dynamics
such as anharmonic vibrations in mechanical resonators
has necessitated real-time surface deformation imaging with higher axial and lateral resolutions
speed
and dynamic range. However
real-time capturing of fast and complex mechanical dynamics has been challenging
and direct time-domain imaging of displacements and mechanical motions has been a missing element in studying full-field structural and dynamic behaviours. Here
by exploiting the electro-optic sampling with a frequency comb
we demonstrate a line-scan time-of-flight (TOF) camera that can simultaneously measure the TOF changes of more than 1000 spatial coordinates with hundreds megapixels/s pixel-rate and sub-nanometre axial resolution over several millimetres field-of-view. This unique combination of performances enables fast and precise imaging of both complex structures and dynamics in three-dimensional devices and mechanical resonators.
S. Petitgrand, 等. 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope. Opt. Lasers Eng., 2001. 3677-101. DOI:10.1016/S0143-8166(01)00040-9http://doi.org/10.1016/S0143-8166(01)00040-9.
N. G. Horton, 等. In vivo three-photon microscopy of subcortical structures within an intact mouse brain. Nat. Photon., 2013. 7205-209. DOI:10.1038/nphoton.2012.336http://doi.org/10.1038/nphoton.2012.336.
D. Huang, 等. Optical coherence tomography. Science, 1991. 2541178-1181. DOI:10.1126/science.1957169http://doi.org/10.1126/science.1957169.
LiDAR drives forwards. Nat. Photon., 2018. 12441.
J. A. Pelesko, D. H. Bernstein. Modeling MEMS and NEMS, CRC press, 2002.
L. Kogut. The influence of surface topography on the electromechanical characteristics of parallel-plate MEMS capacitors. J. Micromech. Microeng., 2005. 151068-1075. DOI:10.1088/0960-1317/15/5/025http://doi.org/10.1088/0960-1317/15/5/025.
W. Osten. Optical Inspection of Microsystems, 2nd ednCRC press, 2019.
J. E. Sader. Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope. J. Appl. Phys., 1998. 8464-76. DOI:10.1063/1.368002http://doi.org/10.1063/1.368002.
N. G. Orji, 等. Metrology for the next generation of semiconductor devices. Nat. Electron., 2018. 1532-547. DOI:10.1038/s41928-018-0150-9http://doi.org/10.1038/s41928-018-0150-9.
T. Haist, 等. Multipoint vibrometry with dynamic and static holograms. Rev. Sci. Instrum., 2013. 84121701DOI:10.1063/1.4845596http://doi.org/10.1063/1.4845596.
E. Hase, 等. Scan-less confocal phase imaging based on dual-comb microscopy. Optica, 2018. 5634-643. DOI:10.1364/OPTICA.5.000634http://doi.org/10.1364/OPTICA.5.000634.
C. Wang, 等. Line-scan spectrum-encoded imaging by dual-comb interferometry. Opt. Lett., 2018. 431606-1609. DOI:10.1364/OL.43.001606http://doi.org/10.1364/OL.43.001606.
K. Goda, 等. Hybrid dispersion laser scanner. Sci. Rep., 2012. 2445DOI:10.1038/srep00445http://doi.org/10.1038/srep00445.
M. Conroy, D. Mansfield. Measuring microscale devices. Nat. Photon., 2008. 2661-663. DOI:10.1038/nphoton.2008.216http://doi.org/10.1038/nphoton.2008.216.
Wilson, T. in Microanalysis of Solids (eds Yacobi, B. G., Holt, D. B. & Kazmerski, L. L. ) 219–232 (Springer, 1994).
D. R. Lee, 等. High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy. Meas. Sci. Technol., 2014. 25125403DOI:10.1088/0957-0233/25/12/125403http://doi.org/10.1088/0957-0233/25/12/125403.
M. H. Matheny, 等. Nonlinear mode-coupling in nanomechanical systems. Nano Lett., 2013. 131622-1626. DOI:10.1021/nl400070ehttp://doi.org/10.1021/nl400070e.
L. G. Villanueva, 等. Surpassing fundamental limits of oscillators using nonlinear resonators. Phys. Rev. Lett., 2013. 110177208DOI:10.1103/PhysRevLett.110.177208http://doi.org/10.1103/PhysRevLett.110.177208.
W. J. Venstra, M. J. Capener, S. R. Elliott. Nanomechanical gas sensing with nonlinear resonant cantilevers. Nanotechnology, 2014. 25425501DOI:10.1088/0957-4484/25/42/425501http://doi.org/10.1088/0957-4484/25/42/425501.
F. Yang, 等. Spatial modulation of nonlinear flexural vibrations of membrane resonators. Phys. Rev. Lett., 2019. 122154301DOI:10.1103/PhysRevLett.122.154301http://doi.org/10.1103/PhysRevLett.122.154301.
G. Anetsberger, 等. Near-field cavity optomechanics with nanomechanical oscillators. Nat. Phys., 2009. 5909-914. DOI:10.1038/nphys1425http://doi.org/10.1038/nphys1425.
M. R. Vanner, 等. Cooling-by-measurement and mechanical state tomography via pulsed optomechanics. Nat. Commun., 2013. 42295DOI:10.1038/ncomms3295http://doi.org/10.1038/ncomms3295.
A. Ganesan, C. Do, A. Seshia. Phononic frequency comb via intrinsic three- wave mixing. Phys. Rev. Lett., 2017. 11833903DOI:10.1103/PhysRevLett.118.033903http://doi.org/10.1103/PhysRevLett.118.033903.
R. Shnaiderman, 等. A submicrometre silicon-on-insulator resonator for ultrasound detection. Nature, 2020. 585372-378. DOI:10.1038/s41586-020-2685-yhttp://doi.org/10.1038/s41586-020-2685-y.
J. Zhang, 等. Optomechanical dissipative solitons. Nature, 2021. 60075-80. DOI:10.1038/s41586-021-04012-1http://doi.org/10.1038/s41586-021-04012-1.
L. Deck, P. de Groot. High-speed noncontact profiler based on scanning white-light interferometry. Appl. Opt., 1994. 337334-7338. DOI:10.1364/AO.33.007334http://doi.org/10.1364/AO.33.007334.
S. J. Rothberg, 等. An international review of laser Doppler vibrometry: making light work of vibration measurement. Opt. Lasers Eng., 2017. 9911-22. DOI:10.1016/j.optlaseng.2016.10.023http://doi.org/10.1016/j.optlaseng.2016.10.023.
Y. Wang, 等. Large-field step-structure surface measurement using a femtosecond laser. Opt. Express, 2020. 2822946-22961. DOI:10.1364/OE.398400http://doi.org/10.1364/OE.398400.
T. Guo, 等. Micro-motion analyzer used for dynamic MEMS characterization. Opt. Lasers Eng., 2009. 47512-517. DOI:10.1016/j.optlaseng.2008.09.006http://doi.org/10.1016/j.optlaseng.2008.09.006.
G. Y. Xu, 等. Digital-micromirror-device-based surface measurement using heterodyne interferometry with optical frequency comb. Appl. Phys. Lett., 2021. 118251104DOI:10.1063/5.0050307http://doi.org/10.1063/5.0050307.
Y. Y. Shi, 等. High speed time-of-flight displacement measurement based on dual-comb electronically controlled optical sampling. Opt. Express, 2022. 308391-8398. DOI:10.1364/OE.454981http://doi.org/10.1364/OE.454981.
O. D. Payton, 等. High-speed atomic force microscopy in slow motion—understanding cantilever behaviour at high scan velocities. Nanotechnology, 2012. 23205704DOI:10.1088/0957-4484/23/20/205704http://doi.org/10.1088/0957-4484/23/20/205704.
L. C. Chen, 等. Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm. Opt. Lasers Eng., 2009. 47237-251. DOI:10.1016/j.optlaseng.2008.05.016http://doi.org/10.1016/j.optlaseng.2008.05.016.
J. Riemensberger, 等. Massively parallel coherent laser ranging using a soliton microcomb. Nature, 2020. 581164-170. DOI:10.1038/s41586-020-2239-3http://doi.org/10.1038/s41586-020-2239-3.
Y. S. Jiang, S. Karpf, B. Jalali. Time-stretch LiDAR as a spectrally scanned time-of-flight ranging camera. Nat. Photon., 2020. 1414-18. DOI:10.1038/s41566-019-0548-6http://doi.org/10.1038/s41566-019-0548-6.
M. J. Sun, 等. Single-pixel three-dimensional imaging with time-based depth resolution. Nat. Commun., 2016. 712010DOI:10.1038/ncomms12010http://doi.org/10.1038/ncomms12010.
C. Rogers, 等. A universal 3D imaging sensor on a silicon photonics platform. Nature, 2021. 590256-261. DOI:10.1038/s41586-021-03259-yhttp://doi.org/10.1038/s41586-021-03259-y.
C. G. Jeon, 等. Simple-structured, subfemtosecond-resolution optical-microwave phase detector. Opt. Lett., 2018. 433997-4000. DOI:10.1364/OL.43.003997http://doi.org/10.1364/OL.43.003997.
J. Kim, F. X. Kärtner, M. H. Perrott. Femtosecond synchronization of radio frequency signals with optical pulse trains. Opt. Lett., 2004. 292076-2078. DOI:10.1364/OL.29.002076http://doi.org/10.1364/OL.29.002076.
K. Jung, J. Kim. Subfemtosecond synchronization of microwave oscillators with mode-locked Er-fiber lasers. Opt. Lett., 2012. 372958-2960. DOI:10.1364/OL.37.002958http://doi.org/10.1364/OL.37.002958.
M. Y. Peng, A. Kalaydzhyan, F. X. Kärtner. Balanced optical-microwave phase detector for sub-femtosecond optical-RF synchronization. Opt. Express, 2014. 2227102-27111. DOI:10.1364/OE.22.027102http://doi.org/10.1364/OE.22.027102.
M. Hyun, 等. Attosecond electronic timing with rising edges of photocurrent pulses. Nat. Commun., 2020. 113667DOI:10.1038/s41467-020-17460-6http://doi.org/10.1038/s41467-020-17460-6.
C. Ahn, 等. Synchronization of an optical frequency comb and a microwave oscillator with 53 zs/Hz1/2 resolution and 10-20-level stability. Photonics Res., 2022. 10365-372. DOI:10.1364/PRJ.443316http://doi.org/10.1364/PRJ.443316.
Y. J. Na, 等. Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection. Nat. Photon., 2020. 14355-360. DOI:10.1038/s41566-020-0586-0http://doi.org/10.1038/s41566-020-0586-0.
P. Lasch, D. Naumann. Spatial resolution in infrared microspectroscopic imaging of tissues. Biochim. Biophys. Acta, 2006. 1758814-829. DOI:10.1016/j.bbamem.2006.06.008http://doi.org/10.1016/j.bbamem.2006.06.008.
C. S. Kang, 等. Optical gauge block metrology in KRISS. Chin. Opt. Lett., 2007. 5S237-S239. .
G. F. Marshall, G. E. Stutz. Handbook of Optical and Laser Scanning, CRC press, 2012.
Fu, Y. et al. High linearity photodiode array with monolithically integrated Wilkinson power combiner. Proc. 2010 IEEE International Topical Meeting on Microwave Photonics. Montreal, QC, Canada: IEEE, 111–113, https://doi.org/10.1109/MWP.2010.5664212https://doi.org/10.1109/MWP.2010.5664212 (2010).
A. Beling, J. C. Campbell. Heterogeneously integrated photodiodes on silicon. IEEE J. Quantum Electron., 2015. 510600506DOI:10.1109/JQE.2015.2480595http://doi.org/10.1109/JQE.2015.2480595.
T. Kato, 等. One-shot three-dimensional imaging using a two-dimensional spectrometer with a fiber bundle. Opt. Express, 2021. 2943778-43792. DOI:10.1364/OE.447187http://doi.org/10.1364/OE.447187.
K. Goda, K. K. Tsia, B. Jalali. Serial time-encoded amplified imaging for real-time observation of fast dynamic phenomena. Nature, 2009. 4581145-1149. DOI:10.1038/nature07980http://doi.org/10.1038/nature07980.
S. A. Diddams, L. Hollberg, V. Mbele. Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb. Nature, 2007. 445627-630. DOI:10.1038/nature05524http://doi.org/10.1038/nature05524.
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