One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region

Joohoon Kim; Wonjoong Kim; Dong Kyo Oh; Hyunjung Kang; Hongyoon Kim; Trevon Badloe; Seokwoo Kim; Chanwoong Park; Hojung Choi; Heon Lee; Junsuk Rho

doi:10.1038/s41377-023-01086-6

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One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region

Original Articles

- One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region
- Light: Science & Applications Vol. 12, Issue 4, Pages: 551-557(2023)
- Affiliations：
  
  1.Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
  2.Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea
  3.Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
  4.POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics, Pohang 37673, Republic of Korea
  5.National Institute of Nanomaterials Technology (NINT), Pohang 37673, Republic of Korea
- Author bio：
  
  Heon Lee (heonlee@korea.ac.kr)
  Junsuk Rho (jsrho@postech.ac.kr)
- Funds：
- DOI：10.1038/s41377-023-01086-6
  CLC：
- Published：30 April 2023，
  
  Published Online：8 March 2023，
  
  Received：14 July 2022，
  
  Revised：25 December 2022，
  
  Accepted：31 January 2023
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Kim, J.et al. One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region.Light: Science & Applications,12, 551-557 (2023).
DOI：

Kim, J.et al. One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region.Light: Science & Applications,12, 551-557 (2023). DOI： 10.1038/s41377-023-01086-6.

摘要

Abstract

A single-step printable platform for ultraviolet (UV) metasurfaces is introduced to overcome both the scarcity of low-loss UV materials and manufacturing limitations of high cost and low throughput. By dispersing zirconium dioxide (ZrO

) nanoparticles in a UV-curable resin

ZrO

nanoparticle-embedded-resin (nano-PER) is developed as a printable material which has a high refractive index and low extinction coefficient from near-UV to deep-UV. In ZrO

nano-PER

the UV-curable resin enables direct pattern transfer and ZrO

nanoparticles increase the refractive index of the composite while maintaining a large bandgap. With this concept

UV metasurfaces can be fabricated in a single step by nanoimprint lithography. As a proof of concept

UV metaholograms operating in near-UV and deep-UV are experimentally demonstrated with vivid and clear holographic images. The proposed method enables repeat and rapid manufacturing of UV metasurfaces

and thus will bring UV metasurfaces more close to real life.

关键词

Keywords

references

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