MoSe<sub>2</sub>/WS<sub>2</sub> heterojunction photodiode integrated with a silicon nitride waveguide for near infrared light detection with high responsivity

Rivka Gherabli; S. R. K. C. Indukuri; Roy Zektzer; Christian Frydendahl; Uriel Levy

doi:10.1038/s41377-023-01088-4

Go to Nature Website

Your Location：

Home >

Browse articles >

MoSe₂/WS₂ heterojunction photodiode integrated with a silicon nitride waveguide for near infrared light detection with high responsivity

Original Articles

- MoSe₂/WS₂ heterojunction photodiode integrated with a silicon nitride waveguide for near infrared light detection with high responsivity
- Light: Science & Applications Vol. 12, Issue 3, Pages: 456-464(2023)
- Affiliations：
  
  Department of Applied Physics, The Faculty of Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem, 91904, Israel
- Author bio：
  
  Uriel Levy (ulevy@mail.huji.ac.il)
- Funds：
- DOI：10.1038/s41377-023-01088-4
  CLC：
- Published：31 March 2023，
  
  Published Online：4 March 2023，
  
  Received：2 August 2022，
  
  Revised：9 January 2023，
  
  Accepted：1 February 2023
Scan for full text
Gherabli R. et al. MoSe₂/WS₂ heterojunction photodiode integrated with a silicon nitride waveguide for near infrared light detection with high responsivity. Light: Science & Applications, 12, 456-464 (2023).
DOI：

Gherabli R. et al. MoSe₂/WS₂ heterojunction photodiode integrated with a silicon nitride waveguide for near infrared light detection with high responsivity. Light: Science & Applications, 12, 456-464 (2023). DOI： 10.1038/s41377-023-01088-4.

摘要

Abstract

We demonstrate experimentally the realization and the characterization of a chip-scale integrated photodetector for the near-infrared spectral regime based on the integration of a MoSe

/WS

heterojunction on top of a silicon nitride waveguide. This configuration achieves high responsivity of ~1 A W

−1

at the wavelength of 780 nm (indicating an internal gain mechanism) while suppressing the dark current to the level of ~50 pA

much lower as compared to a reference sample of just MoSe

without WS

. We have measured the power spectral density of the dark current to be as low as ~1 × 10

−12

A Hz

−0.5

from which we extract the noise equivalent power (NEP) to be ~1 × 10

−12

W Hz

−0.5

. To demonstrate the usefulness of the device

we use it for the characterization of the transfer function of a microring resonator that is integrated on the same chip as the photodetector. The ability to integrate local photodetectors on a chip and to operate such devices with high performance at the near-infrared regime is expected to play a critical role in future integrated devices in the field of optical communications

quantum photonics

biochemical sensing

and more.

关键词

Keywords

references

D. Nikolova , 等 . Modular architecture for fully non-blocking silicon photonic switch fabric . Microsyst. Nanoeng. , 2017 . 3 16071 DOI:10.1038/micronano.2016.71http://doi.org/10.1038/micronano.2016.71 .

A. Shacham , K. Bergman , L. P. Carloni . Photonic networks-on-chip for future generations of chip multiprocessors . IEEE Trans. Comput. , 2008 . 57 1246 -1260 . DOI:10.1109/TC.2008.78http://doi.org/10.1109/TC.2008.78 .

B. Stern , 等 . On-chip mode-division multiplexing switch . Optica , 2015 . 2 530 -535 . DOI:10.1364/OPTICA.2.000530http://doi.org/10.1364/OPTICA.2.000530 .

M. G. Suh , 等 . Searching for exoplanets using a microresonator astrocomb . Nat. Photonics , 2019 . 13 25 -30 . DOI:10.1038/s41566-018-0312-3http://doi.org/10.1038/s41566-018-0312-3 .

Y. Sebbag , 等 . Demonstration of an integrated nanophotonic chip-scale alkali vapor magnetometer using inverse design . Light Sci. Appl. , 2021 . 10 54 DOI:10.1038/s41377-021-00499-5http://doi.org/10.1038/s41377-021-00499-5 .

L. Stern , 等 . Ultra-precise optical to radio frequency based chip-scale refractive index and temperature sensor . Optica , 2017 . 4 1 -7 . DOI:10.1364/OPTICA.4.000001http://doi.org/10.1364/OPTICA.4.000001 .

N. H. Wan , 等 . Large-scale integration of artificial atoms in hybrid photonic circuits . Nature , 2020 . 583 226 -231 . DOI:10.1038/s41586-020-2441-3http://doi.org/10.1038/s41586-020-2441-3 .

J. S. Douglas , 等 . Quantum many-body models with cold atoms coupled to photonic crystals . Nat. Photonics , 2015 . 9 326 -331 . DOI:10.1038/nphoton.2015.57http://doi.org/10.1038/nphoton.2015.57 .

A. W. Elshaari , 等 . Hybrid integrated quantum photonic circuits . Nat. Photonics , 2020 . 14 285 -298 . DOI:10.1038/s41566-020-0609-xhttp://doi.org/10.1038/s41566-020-0609-x .

D. Patterson , I. De Sousa , L. M. Achard . The future of packaging with silicon photonics . Chip Scale Rev. , 2017 . 21 1 -10. .

Barwicz, T. et al. Automated, self-aligned assembly of 12 fibers per nanophotonic chip with standard microelectronics assembly tooling. In 2015 IEEE 65th Electronic Components and Technology Conference (ECTC), 775–782 (San Diego, CA, USA, 2015), https://doi.org/10.1109/ECTC.2015.7159680https://doi.org/10.1109/ECTC.2015.7159680.

S. M. Chen , 等 . Electrically pumped continuous-wave Ⅲ–Ⅴ quantum dot lasers on silicon . Nat. Photonics , 2016 . 10 307 -311 . DOI:10.1038/nphoton.2016.21http://doi.org/10.1038/nphoton.2016.21 .

S. Famà , 等 . High performance germanium-on-silicon detectors for optical communications . Appl. Phys. Lett. , 2002 . 81 586 -588 . DOI:10.1063/1.1496492http://doi.org/10.1063/1.1496492 .

A. W. Fang , 等 . Electrically pumped hybrid AlGaInAs-silicon evanescent laser . Opt. Express , 2006 . 14 9203 -9210 . DOI:10.1364/OE.14.009203http://doi.org/10.1364/OE.14.009203 .

X. K. Sun , 等 . Electrically pumped hybrid evanescent Si/InGaAsP lasers . Opt. Lett. , 2009 . 34 1345 -1347 . DOI:10.1364/OL.34.001345http://doi.org/10.1364/OL.34.001345 .

L. Chen , P. Dong , M. Lipson . High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding . Opt. Express , 2008 . 16 11513 -11518 . DOI:10.1364/OE.16.011513http://doi.org/10.1364/OE.16.011513 .

K. H. Li , 等 . InGaN RGB light-emitting diodes with monolithically integrated photodetectors for stabilizing color chromaticity . IEEE Trans. Ind. Electron. , 2020 . 67 5154 -5160 . DOI:10.1109/TIE.2019.2926038http://doi.org/10.1109/TIE.2019.2926038 .

R. Maiti , 等 . Strain-engineered high-responsivity MoTe2 photodetector for silicon photonic integrated circuits . Nat. Photonics , 2020 . 14 578 -584 . DOI:10.1038/s41566-020-0647-4http://doi.org/10.1038/s41566-020-0647-4 .

T. Sarwar , 等 . On-chip optical spectrometer based on GaN wavelength-selective nanostructural absorbers . Appl. Phys. Lett. , 2020 . 116 081103 DOI:10.1063/1.5143114http://doi.org/10.1063/1.5143114 .

J. X. Chai , 等 . High-speed graphene/InGaN heterojunction photodetectors for potential application in visible light communication . Opt. Express , 2022 . 30 3903 -3912 . DOI:10.1364/OE.450642http://doi.org/10.1364/OE.450642 .

K. H. Li , 等 . Monolithically integrated InGaN/GaN light-emitting diodes, photodetectors, and waveguides on Si substrate . Optica , 2018 . 5 564 -569 . DOI:10.1364/OPTICA.5.000564http://doi.org/10.1364/OPTICA.5.000564 .

E. Peiner , A. Guttzeit , H. H. Wehmann . The effect of threading dislocations on optical absorption and electron scattering in strongly mismatched heteroepitaxial Ⅲ Ⅴ compound semiconductors on silicon . J. Phys. Condens. Matter , 2002 . 14 13195 -13201 . DOI:10.1088/0953-8984/14/48/368http://doi.org/10.1088/0953-8984/14/48/368 .

I. Goykhman , 等 . Locally oxidized silicon surface-plasmon Schottky detector for telecom regime . Nano Lett. , 2011 . 11 2219 -2224 . DOI:10.1021/nl200187vhttp://doi.org/10.1021/nl200187v .

C. Frydendahl , 等 . Giant enhancement of silicon plasmonic shortwave infrared photodetection using nanoscale self-organized metallic films . Optica , 2020 . 7 371 -379 . DOI:10.1364/OPTICA.379549http://doi.org/10.1364/OPTICA.379549 .

B. Desiatov , M. Lončar . Silicon photodetector for integrated lithium niobate photonics . Appl. Phys. Lett. , 2019 . 115 121108 DOI:10.1063/1.5118901http://doi.org/10.1063/1.5118901 .

R. Gherabli , 等 . Role of surface passivation in integrated sub-bandgap silicon photodetection . Opt. Lett. , 2020 . 45 2128 -2131 . DOI:10.1364/OL.388983http://doi.org/10.1364/OL.388983 .

V. Sorianello , 等 . Graphene-silicon phase modulators with gigahertz bandwidth . Nat. Photonics , 2018 . 12 40 -44 . DOI:10.1038/s41566-017-0071-6http://doi.org/10.1038/s41566-017-0071-6 .

J. E. Muench , 等 . Waveguide-integrated, plasmonic enhanced graphene photodetectors . Nano Lett. , 2019 . 19 7632 -7644 . DOI:10.1021/acs.nanolett.9b02238http://doi.org/10.1021/acs.nanolett.9b02238 .

I. Goykhman , 等 . On-chip integrated, silicon-graphene plasmonic Schottky photodetector with high responsivity and avalanche photogain . Nano Lett. , 2016 . 16 3005 -3013 . DOI:10.1021/acs.nanolett.5b05216http://doi.org/10.1021/acs.nanolett.5b05216 .

S. R. K. C. Indukuri , 等 . WS2 monolayers coupled to hyperbolic metamaterial nanoantennas: Broad implications for light-matter-interaction applications . ACS Appl. Nano Mater. , 2020 . 3 10226 -10233 . DOI:10.1021/acsanm.0c02186http://doi.org/10.1021/acsanm.0c02186 .

P. Ma , 等 . Fast MoTe2 waveguide photodetector with high sensitivity at telecommunication wavelengths . ACS Photonics , 2018 . 5 1846 -1852 . DOI:10.1021/acsphotonics.8b00068http://doi.org/10.1021/acsphotonics.8b00068 .

J. R. Schaibley , 等 . Valleytronics in 2D materials . Nat. Rev. Mater. , 2016 . 1 16055 DOI:10.1038/natrevmats.2016.55http://doi.org/10.1038/natrevmats.2016.55 .

A. Chernikov , 等 . Electrical tuning of exciton binding energies in monolayer WS2 . Phys. Rev. Lett. , 2015 . 115 126802 DOI:10.1103/PhysRevLett.115.126802http://doi.org/10.1103/PhysRevLett.115.126802 .

Y. M. You , 等 . Observation of biexcitons in monolayer WSe2 . Nat. Phys. , 2015 . 11 477 -481 . DOI:10.1038/nphys3324http://doi.org/10.1038/nphys3324 .

M. Fischer , 等 . Controlled generation of luminescent centers in hexagonal boron nitride by irradiation engineering . Sci. Adv. , 2021 . 7 DOI:10.1126/sciadv.abe7138http://doi.org/10.1126/sciadv.abe7138 .

M. Klein , 等 . 2D semiconductor nonlinear plasmonic modulators . Nat. Commun. , 2019 . 10 3264 DOI:10.1038/s41467-019-11186-whttp://doi.org/10.1038/s41467-019-11186-w .

N. Flöry , 等 . Waveguide-integrated van der Waals heterostructure photodetector at telecom wavelengths with high speed and high responsivity . Nat. Nanotechnol. , 2020 . 15 118 -124 . DOI:10.1038/s41565-019-0602-zhttp://doi.org/10.1038/s41565-019-0602-z .

J. F. G. Marin , 等 . MoS2 photodetectors integrated with photonic circuits . npj 2D Mater. Appl. , 2019 . 3 14 DOI:10.1038/s41699-019-0096-4http://doi.org/10.1038/s41699-019-0096-4 .

S. F. Wu , 等 . Monolayer semiconductor nanocavity lasers with ultralow thresholds . Nature , 2015 . 520 69 -72 . DOI:10.1038/nature14290http://doi.org/10.1038/nature14290 .

L. Huang , 等 . Waveguide-integrated black phosphorus photodetector for mid-infrared applications . ACS Nano , 2019 . 13 913 -921 . DOI:10.1021/acsnano.8b08758http://doi.org/10.1021/acsnano.8b08758 .

M. A. G. Porcel , 等 . [INVITED] Silicon nitride photonic integration for visible light applications . Opt. Laser Technol. , 2019 . 112 299 -306 . DOI:10.1016/j.optlastec.2018.10.059http://doi.org/10.1016/j.optlastec.2018.10.059 .

R. Zektzer , 等 . Atom-photon interactions in atomic cladded waveguides: bridging atomic and telecom technologies . ACS Photonics , 2021 . 8 879 -886 . DOI:10.1021/acsphotonics.0c01895http://doi.org/10.1021/acsphotonics.0c01895 .

R. Zektzer , 等 . Chiral light-matter interactions in hot vapor-cladded waveguides . Optica , 2019 . 6 15 -18 . DOI:10.1364/OPTICA.6.000015http://doi.org/10.1364/OPTICA.6.000015 .

L. Stern , 等 . Nanoscale light-matter interactions in atomic cladding waveguides . Nat. Commun. , 2013 . 4 1548 DOI:10.1038/ncomms2554http://doi.org/10.1038/ncomms2554 .

L. Stern , 等 . Strong coupling and high-contrast all-optical modulation in atomic cladding waveguides . Nat. Commun. , 2017 . 8 14461 DOI:10.1038/ncomms14461http://doi.org/10.1038/ncomms14461 .

R. Ritter , 等 . Coupling thermal atomic vapor to slot waveguides . Phys. Rev. X , 2018 . 8 021032 .

L. Stern , 等 . Enhanced light-vapor interactions and all optical switching in a chip scale micro-ring resonator coupled with atomic vapor . Laser Photonics Rev. , 2016 . 10 1016 -1022 . DOI:10.1002/lpor.201600176http://doi.org/10.1002/lpor.201600176 .

R. Ritter , 等 . Coupling thermal atomic vapor to an integrated ring resonator . N. J. Phys. , 2016 . 18 103031 DOI:10.1088/1367-2630/18/10/103031http://doi.org/10.1088/1367-2630/18/10/103031 .

L. Stern , M. Grajower , U. Levy . Fano resonances and all-optical switching in a resonantly coupled plasmonic-atomic system . Nat. Commun. , 2014 . 5 4865 DOI:10.1038/ncomms5865http://doi.org/10.1038/ncomms5865 .

L. Stern , 等 . Magnetically controlled atomic-plasmonic fano resonances . Nano Lett. , 2018 . 18 202 -207 . DOI:10.1021/acs.nanolett.7b03912http://doi.org/10.1021/acs.nanolett.7b03912 .

E. Talker , 等 . Plasmonic enhanced EIT and velocity selective optical pumping measurements with atomic vapor . ACS Photonics , 2018 . 5 2609 -2616 . DOI:10.1021/acsphotonics.7b01284http://doi.org/10.1021/acsphotonics.7b01284 .

R. Diekmann , 等 . Chip-based wide field-of-view nanoscopy . Nat. Photonics , 2017 . 11 322 -328 . DOI:10.1038/nphoton.2017.55http://doi.org/10.1038/nphoton.2017.55 .

O. Lotan , 等 . Nanoscale plasmonic V-groove waveguides for the interrogation of single fluorescent bacterial cells . Nano Lett. , 2017 . 17 5481 -5488 . DOI:10.1021/acs.nanolett.7b02132http://doi.org/10.1021/acs.nanolett.7b02132 .

D. M. Lukin , 等 . 4H-silicon-carbide-on-insulator for integrated quantum and nonlinear photonics . Nat. Photonics , 2020 . 14 330 -334 . DOI:10.1038/s41566-019-0556-6http://doi.org/10.1038/s41566-019-0556-6 .

M. K. Bhaskar , 等 . Experimental demonstration of memory-enhanced quantum communication . Nature , 2020 . 580 60 -64 . DOI:10.1038/s41586-020-2103-5http://doi.org/10.1038/s41586-020-2103-5 .

Z. R. Wu , 等 . Integrating graphene/MoS2 heterostructure with SiNx waveguide for visible light detection at 532 nm wavelength . Phys. Status Solidi-Rapid Res. Lett. , 2019 . 13 1800338 DOI:10.1002/pssr.201800338http://doi.org/10.1002/pssr.201800338 .

D. A. Neamen . Semiconductor physics and devices . Mater. Today , 2006 . 9 57 .

X. G. Zhao , 等 . Band structure engineering through van der Waals heterostructing superlattices of two‐dimensional transition metal dichalcogenides . InfoMat , 2021 . 3 201 -211 . DOI:10.1002/inf2.12155http://doi.org/10.1002/inf2.12155 .

A. Varghese , 等 . Near-direct bandgap WSe2/ReS2 type-Ⅱ pn heterojunction for enhanced ultrafast photodetection and high-performance photovoltaics . Nano Lett. , 2020 . 20 1707 -1717 . DOI:10.1021/acs.nanolett.9b04879http://doi.org/10.1021/acs.nanolett.9b04879 .

X. Y. Tian , Y. S. Liu . Van der Waals heterojunction ReSe2/WSe2 polarization-resolved photodetector . J. Semicond. , 2021 . 42 032001 DOI:10.1088/1674-4926/42/3/032001http://doi.org/10.1088/1674-4926/42/3/032001 .

H. Xia , 等 . Pristine PN junction toward atomic layer devices . Light Sci. Appl. , 2022 . 11 170 DOI:10.1038/s41377-022-00814-8http://doi.org/10.1038/s41377-022-00814-8 .

R. Zektzer , 等 . Nanoscale atomic suspended waveguides for improved vapour coherence times and optical frequency referencing . Nat. Photonics , 2021 . 15 772 -779 . DOI:10.1038/s41566-021-00853-4http://doi.org/10.1038/s41566-021-00853-4 .

D. G. Purdie , 等 . Cleaning interfaces in layered materials heterostructures . Nat. Commun. , 2018 . 9 5387 DOI:10.1038/s41467-018-07558-3http://doi.org/10.1038/s41467-018-07558-3 .

P. J. Zomer , 等 . Fast pick up technique for high quality heterostructures of bilayer graphene and hexagonal boron nitride . Appl. Phys. Lett. , 2014 . 105 013101 DOI:10.1063/1.4886096http://doi.org/10.1063/1.4886096 .

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

⁰

MoSe2/WS2 heterojunction photodiode integrated with a silicon nitride waveguide for near infrared light detection with high responsivity

DOI：10.1038/s41377-023-01088-4

摘要

Abstract

关键词

Keywords

references

MoSe₂/WS₂ heterojunction photodiode integrated with a silicon nitride waveguide for near infrared light detection with high responsivity