Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution

Zhihao Liu; Guangwei Hu; Huapeng Ye; Miaoyang Wei; Zhenghao Guo; Kexu Chen; Chen Liu; Biao Tang; Guofu Zhou

doi:10.1038/s41377-023-01174-7

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Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution

Original Articles

- Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution
- Light: Science & Applications Vol. 12, Issue 7, Pages: 1318-1326(2023)
- Affiliations：
  
  1.Guangdong Provincial Key Laboratory of Optical Information Materials and Technology & Institute of Electronic Paper Displays, South China Academy of Advanced Optoelectronics, South China Normal University, Guangzhou 510006, China
  2.National Center for International Research on Green Optoelectronics, South China Normal University, Guangzhou 510006, China
  3.School of Electrical and Electronic Engineering, 50 Nanyang Avenue, Nanyang Technological University, Singapore 639798, Singapore
  4.Shenzhen Guohua Optoelectronics Tech. Co. Ltd, Shenzhen 518110, China
- Author bio：
  
  Huapeng Ye (yehp@m.scnu.edu.cn)
  Biao Tang (tangbiao@scnu.edu.cn)
  Guofu Zhou (guofu.zhou@m.scnu.edu.cn)
- Funds：
- DOI：10.1038/s41377-023-01174-7
  CLC：
- Published：31 July 2023，
  
  Published Online：07 June 2023，
  
  Received：02 January 2023，
  
  Revised：11 April 2023，
  
  Accepted：26 April 2023
- Accepted：
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Liu, Z. H. et al. Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution. Light: Science & Applications, 12, 1318-1326 (2023).
DOI：

Liu, Z. H. et al. Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution. Light: Science & Applications, 12, 1318-1326 (2023). DOI： 10.1038/s41377-023-01174-7.

摘要

Abstract

Microlens arrays (MLAs) based on the selective wetting have opened new avenues for developing compact and miniaturized imaging and display techniques with ultrahigh resolution beyond the traditional bulky and volumetric optics. However

the selective wetting lenses explored so far have been constrained by the lack of precisely defined pattern for highly controllable wettability contrast

thus limiting the available droplet curvature and numerical aperture

which is a major challenge towards the practical high-performance MLAs. Here we report a mold-free and self-assembly approach of mass-production of scalable MLAs

which can also have ultrasmooth surface

ultrahigh resolution

and the large tuning range of the curvatures. The selective surface modification based on tunable oxygen plasma can facilitate the precise pattern with adjusted chemical contrast

thus creating large-scale microdroplets array with controlled curvature. The numerical aperture of the MLAs can be up to 0.26 and precisely tuned by adjusting the modification intensity or the droplet dose. The fabricated MLAs have high-quality surface with subnanometer roughness and allow for record-high resolution imaging up to equivalently 10

328 ppi

as we demonstrated. This study shows a cost-effective roadmap for mass-production of high-performance MLAs

which may find applications in the rapid proliferating integral imaging industry and high-resolution display.

关键词

Keywords

references

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