High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy

Mindaugas Juodėnas; Erik Strandberg; Alexander Grabowski; Johan Gustavsson; Hana Šípová-Jungová; Anders Larsson; Mikael Käll

doi:10.1038/s41377-023-01286-0

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High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy

Original Articles

- High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy
- Light: Science & Applications Vol. 12, Issue 11, Pages: 2434-2442(2023)
- Affiliations：
  
  1.Department of Physics, Chalmers University of Technology, 412 96 Gothenburg, Sweden
  2.Department of Microtechnology and Nanoscience, Chalmers University of Technology, 412 96 Gothenburg, Sweden
- Author bio：
  
  Mindaugas Juodėnas (mindaugas.juodenas@chalmers.se)
  Mikael Käll (mikael.kall@chalmers.se)
- Funds：
- DOI：10.1038/s41377-023-01286-0
  CLC：
- Published：30 November 2023，
  
  Published Online：13 October 2023，
  
  Received：26 May 2023，
  
  Revised：14 September 2023，
  
  Accepted：14 September 2023
- Accepted：
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Juodėnas, M. et al. High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy. Light: Science & Applications, 12, 2434-2442 (2023).
DOI：

Juodėnas, M. et al. High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy. Light: Science & Applications, 12, 2434-2442 (2023). DOI： 10.1038/s41377-023-01286-0.

摘要

Abstract

Flat metaoptics components are looking to replace classical optics elements and could lead to extremely compact biophotonics devices if integrated with on-chip light sources and detectors. However

using metasurfaces to shape light into wide angular range wavefronts with high efficiency

as is typically required in high-contrast microscopy applications

remains a challenge. Here we demonstrate curved GaAs metagratings integrated on vertical-cavity surface-emitting lasers (VCSELs) that enable on-chip illumination in total internal reflection and dark field microscopy. Based on an unconventional design that circumvents the aspect ratio dependent etching problems in monolithic integration

we demonstrate off-axis emission centred at 60° in air and 63° in glass with > 90% and > 70% relative deflection efficiency

respectively. The resulting laser beam is collimated out-of-plane but maintains Gaussian divergence in-plane

resulting in a long and narrow illumination area. We show that metagrating-integrated VCSELs of different kinds can be combined to enable rapid switching between dark-field and total internal reflection illumination. Our approach provides a versatile illumination solution for high-contrast imaging that is compatible with conventional microscopy setups and can be integrated with biophotonics devices

such as portable microscopy

NIR-II range bioimaging

and lab-on-a-chip devices.

关键词

Keywords

references

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