Single-lens dynamic <inline-formula><tex-math id="M1">$ z $</tex-math></inline-formula>-scanning for simultaneous in situ position detection and laser processing focus control

Xiaohan Du; Camilo Florian; Craig B. Arnold

doi:10.1038/s41377-023-01303-2

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Single-lens dynamic

$ z $

-scanning for simultaneous in situ position detection and laser processing focus control

Original Articles

- Single-lens dynamic $ z $-scanning for simultaneous in situ position detection and laser processing focus control
- Light: Science & Applications Vol. 12, Issue 12, Pages: 2655-2667(2023)
- Affiliations：
  
  1.Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, NJ 08544, USA
  2.Department of Systems Engineering, City University of Hong Kong, Hong Kong, China
  3.Institut für Werkstofftechnik, Universität Kassel, 34125 Kassel, Germany
  4.Princeton Materials Institute, Princeton University, Princeton, NJ 08544, USA
- Author bio：
  
  Craig B. Arnold (cbarnold@princeton.edu)
- Funds：
- DOI：10.1038/s41377-023-01303-2
  CLC：
- Published：31 December 2023，
  
  Published Online：17 November 2023，
  
  Received：22 June 2023，
  
  Revised：02 October 2023，
  
  Accepted：09 October 2023
- Accepted：
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Du, X. H., Florian, C. & Arnold, C. B. Single-lens dynamic $ z $-scanning for simultaneous in situ position detection and laser processing focus control. Light: Science & Applications, 12, 2655-2667 (2023).
DOI：

Du, X. H., Florian, C. & Arnold, C. B. Single-lens dynamic $ z $-scanning for simultaneous in situ position detection and laser processing focus control. Light: Science & Applications, 12, 2655-2667 (2023). DOI： 10.1038/s41377-023-01303-2.

摘要

Abstract

Existing auto-focusing methods in laser processing typically include two independent modules

one for surface detection and another for

$$ z $$

-axis adjustment. The latter is mostly implemented by mechanical

$$ z $$

stage motion

which is up to three orders of magnitude slower than the lateral processing speed. To alleviate this processing bottleneck

we developed a single-lens approach

using only one high-speed

$$ z $$

-scanning optical element

to accomplish both in situ surface detection and focus control quasi-simultaneously in a dual-beam setup. The probing beam scans the surface along the

$$ z $$

-axis continuously

and its reflection is detected by a set of confocal optics. Based on the temporal response of the detected signal

we have developed and experimentally demonstrated a dynamic surface detection method at 140–350 kHz

with a controlled detection range

high repeatability

and minimum linearity error of 1.10%. Sequentially

by synchronizing at a corresponding oscillation phase of the

$$ z $$

-scanning lens

the fabrication beam is directed to the probed

$$ z $$

position for precise focus alignment. Overall

our approach provides instantaneous surface tracking by collecting position information and executing focal control both at 140–350 kHz

which significantly accelerates the axial alignment process and offers great poten

tial for enhancing the speed of advanced manufacturing processes in three-dimensional space.

关键词

Keywords

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Single-lens dynamic $ z $-scanning for simultaneous in situ position detection and laser processing focus control

DOI：10.1038/s41377-023-01303-2

摘要

Abstract

关键词

Keywords

references