MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

Tianbo Liu; Milind Rajadhyaksha; David L. Dickensheets

doi:10.1038/s41377-019-0167-5

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MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

Article

- MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope
- MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope
- LSA 2019年8卷第4期页码：527-537
- Affiliations：
  
  1.Electrical and Computer Engineering Department, Montana State University, Bozeman, MT 59715, USA
  2.Dermatology Department, Memorial Sloan Kettering Cancer Center, New York, NY 10022, USA
- Author bio：
  
  David L. Dickensheets (davidd@montana.edu)
- Funds：
- DOI：10.1038/s41377-019-0167-5
  中图分类号：
- 纸质出版日期：2019，
  
  网络出版日期：2019-06-26，
  
  收稿日期：2018-12-05，
  
  修回日期：2019-05-24，
  
  录用日期：2019-05-30
- Accepted：
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MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope[J]. LSA, 2019,8(4):527-537.

Liu, T. B., Rajadhyaksha, M. & Dickensheets, D. L. MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope. Light: Science & Applications, 8, 527-537 (2019).
MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope[J]. LSA, 2019,8(4):527-537. DOI： 10.1038/s41377-019-0167-5.

Liu, T. B., Rajadhyaksha, M. & Dickensheets, D. L. MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope. Light: Science & Applications, 8, 527-537 (2019). DOI： 10.1038/s41377-019-0167-5.

摘要

Abstract

Laser scanning microscopes can be miniaturized for in vivo imaging by substituting optical microelectromechanical system (MEMS) devices in place of larger components. The emergence of multifunctional active optical devices can support further miniaturization beyond direct component replacement because those active devices enable diffraction-limited performance using simpler optical system designs. In this paper

we propose a catadioptric microscope objective lens that features an integrated MEMS device for performing biaxial scanning

axial focus adjustment

and control of spherical aberration. The MEMS-in-the-lens architecture incorporates a reflective MEMS scanner between a low-numerical-aperture back lens group and an aplanatic hyperhemisphere front refractive element to support high-numerical-aperture imaging. We implemented this new optical system using a recently developed hybrid polymer/silicon MEMS three-dimensional scan mirror that features an annular aperture that allows it to be coaxially aligned within the objective lens without the need for a beam splitter. The optical performance of the active catadioptric system is simulated and imaging of hard targets and human cheek cells is demonstrated with a confocal microscope that is based on the new objective lens design.

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references

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