A micromirror array with annular partitioning for high-speed random-access axial focusing

Nathan Tessema Ersumo; Cem Yalcin; Nick Antipa; Nicolas Pégard; Laura Waller; Daniel Lopez; Rikky Muller

doi:10.1038/s41377-020-00420-6

Go to Nature Website

Your Location：

Home >

Browse articles >

A micromirror array with annular partitioning for high-speed random-access axial focusing

Original Articles

- A micromirror array with annular partitioning for high-speed random-access axial focusing
- A micromirror array with annular partitioning for high-speed random-access axial focusing
- LSA 2020年9卷第6期页码：1917-1931
- Affiliations：
  
  1.The University of California, Berkeley and University of California, San Francisco Graduate Program in Bioengineering, Berkeley, CA 94720, USA
  2.Department of Electrical Engineering & Computer Sciences, University of California, Berkeley, CA 94720, USA
  3.Department of Applied Physical Sciences, University of North Carolina at Chapel Hill, Chapel Hill, NC 27514, USA
  4.Chan Zuckerberg Biohub, San Francisco, CA 94158, USA
  5.Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
- Author bio：
  
  Rikky Muller (rikky@berkeley.edu)
- Funds：
- DOI：10.1038/s41377-020-00420-6
  中图分类号：
- 纸质出版日期：2020，
  
  网络出版日期：2020-10-29，
  
  收稿日期：2020-06-13，
  
  修回日期：2020-09-29，
  
  录用日期：2020-10-12
- Accepted：
Scan QR Code
A micromirror array with annular partitioning for high-speed random-access axial focusing[J]. LSA, 2020,9(6):1917-1931.

Ersumo, N. T. et al. A micromirror array with annular partitioning for high-speed random-access axial focusing. Light: Science & Applications, 9, 1917-1931 (2020).
A micromirror array with annular partitioning for high-speed random-access axial focusing[J]. LSA, 2020,9(6):1917-1931. DOI： 10.1038/s41377-020-00420-6.

Ersumo, N. T. et al. A micromirror array with annular partitioning for high-speed random-access axial focusing. Light: Science & Applications, 9, 1917-1931 (2020). DOI： 10.1038/s41377-020-00420-6.

摘要

Abstract

Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy

augmented/virtual reality (AR/VR)

adaptive optics and material processing. However

the limitations of existing varifocal tools continue to beset the performance capabilities and operating overhead of the optical systems that mobilize such functionality. The varifocal tools that are the least burdensome to operate (e.g. liquid crystal

elastomeric or optofluidic lenses) suffer from low (≈100 Hz) refresh rates. Conversely

the fastest devices sacrifice either critical capabilities such as their dwelling capacity (e.g. acoustic gradient lenses or monolithic micromechanical mirrors) or low operating overhead (e.g. deformable mirrors). Here

we present a general-purpose random-access axial focusing device that bridges these previously conflicting features of high speed

dwelling capacity and lightweight drive by employing low-rigidity micromirrors that exploit the robustness of defocusing phase profiles. Geometrically

the device consists of an 8.2 mm diameter array of piston-motion and 48-μm-pitch micromirror pixels that provide 2π phase shifting for wavelengths shorter than 1100 nm with 10–90% settling in 64.8 μs (i.e.

15.44 kHz refresh rate). The pixels are electrically partitioned into 32 rings for a driving scheme that enables phase-wrapped operation with circular symmetry and requires < 30 V per channel. Optical experiments demonstrated the array's wide focusing range with a measured ability to target 29 distinct resolvable depth planes. Overall

the features of the proposed array offer the potential for compact

straightforward methods of tackling bottlenecked applications

including high-throughput single-cell targeting in neurobiology and the delivery of dense 3D visual information in AR/VR.

关键词

Keywords

references

Žurauskas, M. et al. Rapid adaptive remote focusing microscope for sensing of volumetric neural activity.Biomed. Opt. Express8, 4369–4379 (2017)..

Dunn, D. et al. Wide field of view varifocal near-eye display using see-through deformable membrane mirrors.IEEE Trans. Vis. Computer Graph.23, 1322–1331 (2017)..

Grulkowski, I. et al. Swept source optical coherencetomography and tunable lens technology for comprehensive imaging and biometry of the whole eye.Optica5, 52–59 (2018)..

Chen, T. H., Fardel, R.&Arnold, C. B. Ultrafast z-scanning for high-efficiency laser micro-machining.Light.: Sci. Appl.7, 17181 (2018)..

Meitzen, J. et al. Measurements of neuron soma size and density in rat dorsal striatum, nucleus accumbens core and nucleus accumbens shell: differences between striatal region and brain hemisphere, but not sex.Neurosci. Lett.487, 177–181 (2011)..

Wang, T. Y. et al. Quantitative analysis of 1300-nm three-photon calcium imaging in the mouse brain.Elife9, e53205 (2020)..

Borghuis, B. G. et al. Temporal limits of visual motion processing: psychophysics and neurophysiology.Vision3, 5 (2019)..

Sando, Y., Barada, D.&Yatagai, T. Full-color holographic 3D display with horizontal full viewing zone by spatiotemporal-division multiplexing.Applid Opt.57, 7622–7626 (2018)..

Bathe-Peters, M., Annibale, P.&Lohse, M. J. All-optical microscope autofocus based on an electrically tunable lens and a totally internally reflected IR laser.Opt. Express26, 2359–2368 (2018)..

Ozbay, B. N. et al. Miniaturized fiber-coupled confocal fluorescence microscope with an electrowetting variable focus lens using no moving parts.Opt. Lett.40, 2553–2556 (2015)..

Wang, L. H., Hayakawa, T.&Ishikawa, M. Dielectric-elastomer-based fabrication method for varifocal microlens array.Opt. Express25, 31708–31717 (2017)..

Wang, Y.-J., Hsieh, H.-A.&Lin, Y.-H. Electrically tunable gradient-index lenses via nematic liquid crystals with a method of spatially extended phase distribution.Opt. Express27, 32398–32408 (2019)..

Iwai, D. et al. Speeded-up focus control of electrically tunable lens by sparse optimization.Sci. Rep.9, 12365 (2019)..

Römer, G. R. B. E.&Bechtold, P. Electro-optic and acousto-optic laser beam scanners.Phys. Procedia56, 29–39 (2014)..

Zhang, Z. C., You, Z.&Chu, D. P. Fundamentals of phase-only liquid crystal on silicon (LCOS) devices.Light.: Sci. Appl.3, e213 (2014)..

Chakraborty, T. et al. Converting lateral scanning into axial focusing to speed up three-dimensional microscopy.Light.: Sci. Appl.9, 165 (2020)..

Kang, S. et al. Ultra-high-speed variable focus optics for novel applications in advanced imaging.Proceedings of SPIE 10539, Photonic Instrumentation Engineering V.(SPIE, San Francisco, 2018).

Shao, Y. H., Dickensheets, D. L.&Himmer, P. 3-D MOEMS mirror for laser beam pointing and focus control.IEEE J. Sel. Top. Quantum Electron.10, 528–535 (2004)..

Janin, P. et al. Characterization of a fast piezoelectric varifocal MEMS mirror.Proceedings of 2018 International Conference on Optical MEMS and Nanophotonics (OMN).(IEEE, Lausanne, 2018).

Dwight, J. G.&Tkaczyk, T. S. Lenslet array tunable snapshot imaging spectrometer (LATIS) for hyperspectral fluorescence microscopy.Biomed. Opt. Express8, 1950–1964 (2017)..

Ronzitti, E. et al. Submillisecond optogenetic control of neuronal firing with two-photon holographic photoactivation of chronos.J. Neurosci.37, 10679–10689 (2017)..

Pollock, C. et al. Open loop control theory algorithms for high-speed 3D MEMS optical switches.Opt. Express28, 2010–2019 (2020)..

Solgaard, O.Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems.(Springer Science&Business Media, Boston, 2009).

Brubaker, N. D. et al. Refinements to the study of electrostatic deflections: theory and experiment.Eur. J. Appl. Math.24, 343–370 (2013)..

Liu, T. B., Rajadhyaksha, M.&Dickensheets, D. L. MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope.Light.: Sci. Appl.8, 59 (2019)..

Hamann, S.&Solgaard, O. Variable focusing and steering using high speed MEMS phased array.Proceedings of 2018 International Conference on Optical MEMS and Nanophotonics (OMN).(IEEE, Lausanne, 2018).

Blanche, P. A. inOptical Holography-Materials, Theory and Applications(ed. Blanche, P. A.) 1–39 (Elsevier, Amsterdam, 2020).

Yan, Y. F. et al. Optical performance evaluation and chromatic aberration correction of a focus tunable lens used for 3D microscopy.Biomed. Opt. Express10, 6029–6042 (2019)..

Salter, P. S.&Booth, M. J. Adaptive optics in laser processing.Light.: Sci. Appl.8, 110 (2019)..

Li, X. Y. et al. Adaptive optimization for axial multi-foci generation in multiphoton microscopy.Opt. Express27, 35948–35961 (2019)..

Kumar, A. et al. Post-release deformation and curvature correction of an electrothermally actuated MEMS bilayer platform.Microelectron. Eng.221, 111192 (2020)..

Song, Y. P., Panas, R. M.&Hopkins, J. B. A review of micromirror arrays.Precis. Eng.51, 729–761 (2018)..

Madec, P. Y. Overview of deformable mirror technologies for adaptive optics and astronomy. inAdaptive Optics Systems III8447 (SPIE, 2012).

Martínez, A., del Mar Sánchez-López, M.&Moreno, I. Phasor analysis of binary diffraction gratings with different fill factors.Eur. J. Phys.28, 805–816 (2007)..

Zhang, H. et al. Elimination of a zero-order beam induced by a pixelated spatial light modulator for holographic projection.Appl. Opt.48, 5834–5841 (2009)..

Márquez, A. et al. Amplitude apodizers encoded onto Fresnel lenses implemented on a phase-only spatial light modulator.Appl. Opt.40, 2316–2322 (2001)..

Benton, D. M. Multiple beam steering using dynamic zone plates on a micromirror array.Optical Eng.57, 073109 (2018)..

Ryan, P. J. et al. Performance analysis of two high actuator count MEMS deformable mirrors.Proceedings of SPIE 8617, MEMS Adaptive Optics VII.(SPIE, San Francisco, 2013).

Watson, G. P. et al. Spatial light modulator for maskless optical projection lithography.J. Vac. Sci. Technol. B: Microelectron. Nanometer Struct. Process., Meas., Phenom.24, 2852–2856 (2006)..

Lapisa, M. et al. CMOS-integrable piston-type micro-mirror array for adaptive optics made of mono-crystalline silicon using 3-D integration.Proceedings of the 2nd IEEE International Conference on Micro Electro Mechanical Systems.(IEEE, Sorrento, 2009).

Ersumo, N. T. et al. Design framework for high-speed 3D scanning tools and development of an axial focusing micromirror-based array.Proceedings of SPIE 11293, MOEMS and Miniaturized Systems XIX.(SPIE, San Francisco, 2020).

Montfort, F. et al. Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM).Proceedings of SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI.(SPIE, San Jose, 2007).

Dejene, F. B.&Ocaya, R. O. Electrical, optical and structural properties of pure and gold-coated VO2thin films on quartz substrate.Curr. Appl. Phys.10, 508–512 (2010)..

Pégard, N. C. et al. Three-dimensional scanless holographic optogenetics with temporal focusing (3D-SHOT).Nat. Commun.8, 1228 (2017)..

Sancataldo, G. et al. Flexible multi-beam light-sheet fluorescence microscope for live imaging without striping artifacts.Front. Neuroanat.13, 7 (2019)..

Reddy, G. D.&Saggau, P. Fast three-dimensional laser scanning scheme using acousto-optic deflectors.J. Biomed. Opt.10, 064038 (2005)..

Park, S. et al. Electrically focus-tuneable ultrathin lens for high-resolution square subpixels.Light.: Sci. Appl.9, 98 (2020)..

Arbabi, E. et al. MEMS-tunable dielectric metasurface lens.Nat. Commun.9, 812 (2018)..

Roy, T. et al. Dynamic metasurface lens based on MEMS technology.APL Photonics3, 021302 (2018)..

Lazarev, G. et al. Beyond the display: phase-only liquid crystal on Silicon devices and their applications in photonics.Opt. Express27, 16206–16249 (2019)..

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

暂无数据