Direct laser writing of volumetric gradient index lenses and waveguides

Christian R. Ocier; Corey A. Richards; Daniel A. Bacon-Brown; Qing Ding; Raman Kumar; Tanner J. Garcia; Jorik van de Groep; Jung-Hwan Song; Austin J. Cyphersmith; Andrew Rhode; Andrea N. Perry; Alexander J. Littlefield; Jinlong Zhu; Dajie Xie; Haibo Gao; Jonah F. Messinger; Mark L. Brongersma; Kimani C. Toussaint Jr.; Lynford L. Goddard; Paul V. Braun

doi:10.1038/s41377-020-00431-3

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Direct laser writing of volumetric gradient index lenses and waveguides

Original Articles

- Direct laser writing of volumetric gradient index lenses and waveguides
- Direct laser writing of volumetric gradient index lenses and waveguides
- LSA 2020年9卷第6期页码：1993-2006
- Affiliations：
  
  1.Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
  2.Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
  3.Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
  4.Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
  5.Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
  6.Carl R. Woese Institute for Genomic Biology, University of Illinois at UrbanaChampaign, Urbana, IL, USA
  7.Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Author bio：
  
  Lynford L. Goddard (lgoddard@illinois.edu)
  Paul V. Braun (pbraun@illinois.edu)
- Funds：
- DOI：10.1038/s41377-020-00431-3
  中图分类号：
- 纸质出版日期：2020，
  
  网络出版日期：2020-12-03，
  
  收稿日期：2020-08-02，
  
  修回日期：2020-10-27，
  
  录用日期：2020-11-10
- Accepted：
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Direct laser writing of volumetric gradient index lenses and waveguides[J]. LSA, 2020,9(6):1993-2006.

Ocier, C. R. et al. Direct laser writing of volumetric gradient index lenses and waveguides. Light: Science & Applications, 9, 1993-2006 (2020).
Direct laser writing of volumetric gradient index lenses and waveguides[J]. LSA, 2020,9(6):1993-2006. DOI： 10.1038/s41377-020-00431-3.

Ocier, C. R. et al. Direct laser writing of volumetric gradient index lenses and waveguides. Light: Science & Applications, 9, 1993-2006 (2020). DOI： 10.1038/s41377-020-00431-3.

摘要

Abstract

Direct laser writing (DLW) has been shown to render 3D polymeric optical components

including lenses

beam expanders

and mirrors

with submicrometer precision. However

these printed structures are limited to the refractive index and dispersive properties of the photopolymer. Here

we present the subsurface controllable refractive index via beam exposure (SCRIBE) method

a lithographic approach that enables the tuning of the refractive index over a range of greater than 0.3 by performing DLW inside photoresist-filled nanoporous silicon and silica scaffolds. Adjusting the laser exposure during printing enables 3D submicron control of the polymer infilling and thus the refractive index and chromatic dispersion. Combining SCRIBE's unprecedented index range and 3D writing accuracy has realized the world's smallest (15 µm diameter) spherical Luneburg lens operating at visible wavelengths. SCRIBE's ability to tune the chromatic dispersion alongside the refractive index was leveraged to render achromatic doublets in a single printing step

eliminating the need for multiple photoresins and writing sequences. SCRIBE also has the potential to form multicomponent optics by cascading optical elements within a scaffold. As a demonstration

stacked focusing structures that generate photonic nanojets were fabricated inside porous silicon. Finally

an all-pass ring resonator was coupled to a subsurface 3D waveguide. The measured quality factor of 4600 at 1550 nm suggests the possibility of compact photonic systems with optical interconnects that traverse multiple planes. SCRIBE is uniquely suited for constructing such photonic integrated circuits due to its ability to integrate multiple optical components

including lenses and waveguides

without additional printed supports.

关键词

Keywords

references

Hohmann, J. K. et al. Three-dimensional μ-printing: an enabling technology.Adv. Opt. Mater.3, 1488–1507 (2015)..

Gissibl, T. et al. Two-photon direct laser writing of ultracompact multi-lens objectives.Nat. Photonics10, 554–560 (2016)..

Dietrich, P. I. et al. In situ 3D nanoprinting of free-form coupling elements for hybrid photonic integration.Nat. Photonics12, 241–247 (2018)..

Deubel, M. et al. Direct laser writing of three-dimensional photonic-crystal templates for telecommunications.Nat. Mater.3, 444–447 (2004)..

Gansel, J. K. et al. Gold helix photonic metamaterial as broadband circular polarizer.Science325, 1513–1515 (2009)..

Fischer, J.&Wegener, M. Three-dimensional optical laser lithography beyond the diffraction limit.Laser Photonics Rev.7, 22–44 (2013)..

Gissibl, T. et al. Sub-micrometre accurate free-form optics by three-dimensional printing on single-mode fibres.Nat. Commun.7, 11763 (2016)..

Thiele, S. et al. 3D-printed eagle eye: compound microlens system for foveated imaging.Sci. Adv.3, e1602655 (2017)..

Toulouse, A. et al. Alignment-free integration of apertures and nontransparent hulls into 3D-printed micro-optics.Opt. Lett.43, 5283–5286 (2018)..

Yan, W. S., Cumming, B. P.&Gu, M. High-throughput fabrication of micrometer-sized compound parabolic mirror arrays by using parallel laser direct-write processing.J. Opt.17, 075803 (2015)..

Jandura, D., Pudis, D.&Berezina, S. Photonic devices prepared by embossing in PDMS.Appl. Surf. Sci.395, 145–149 (2017)..

Ergin, T. et al. Three-dimensional invisibility cloak at optical wavelengths.Science328, 337–339 (2010)..

Liberale, C. et al. Micro-optics fabrication on top of optical fibers using two-photon lithography.IEEE Photonics Technol. Lett.22, 474–476 (2010)..

Gissibl, T., Schmid, M.&Giessen, H. Spatial beam intensity shaping using phase masks on single-mode optical fibers fabricated by femtosecond direct laser writing.Optica3, 448–451 (2016)..

Selimis, A., Mironov, V.&Farsari, M. Direct laser writing: principles and materials for scaffold 3D printing.Microelectron. Eng.132, 83–89 (2015)..

Malinauskas, M. et al. Ultrafast laser nanostructuring of photopolymers: a decade of advances.Phys. Rep.533, 1–31 (2013)..

Dottermusch, S. et al. Exposure-dependent refractive index of Nanoscribe IP-Dip photoresist layers.Opt. Lett.44, 29–32 (2019)..

Žukauskas, A. et al. Tuning the refractive index in 3D direct laser writing lithography: towards GRIN microoptics.Laser Photonics Rev.9, 706–712 (2015)..

Accardo, A. et al. Multiphoton direct laser writing and 3D imaging of polymeric freestanding architectures for cell colonization.Small13, 1700621 (2017)..

Berger, M. G. et al. Dielectric filters made of PS: advanced performance by oxidation and new layer structures.Thin Solid Films297, 237–240 (1997)..

Ocier, C. R. et al. Tunable visibly transparent optics derived from porous silicon.ACS Photonics4, 909–914 (2017)..

Waller, E. H., Renner, M.&von Freymann, G. Active aberration- and point-spread-function control in direct laser writing.Opt. Express20, 24949–24956 (2012)..

Guney, M. G.&Fedder, G. K. Estimation of line dimensions in 3D direct laser writing lithography.J. Micromech. Microeng.26, 105011 (2016)..

Gurram, S.&Nath, A. K. Analysis of tuning of Bragg wavelength of photowritten fiber Bragg gratings during the inscription process using a biprism.Appl. Opt.46, 2197–2204 (2007)..

Rizvi, N. H.&Gower, M. C. Production of submicrometer period Bragg gratings in optical fibers using wavefront division with a biprism and an excimer laser source.Appl. Phys. Lett.67, 739–741 (1995)..

Ocier, C. R. et al. Optically anisotropic porous silicon microlenses with tunable refractive indexes and birefringence profiles.Opt. Mater. Express10, 868–883 (2020)..

Ruffieux, P. et al. On the chromatic aberration of microlenses.Opt. Express14, 4687–4694 (2006)..

Zhu, J. L.&Goddard, L. L. Spatial control of photonic nanojets.Opt. Express24, 30444–30464 (2016)..

Heifetz, A. et al. Photonic nanojets.J. Comput. Theor. Nanosci.6, 1979–1992 (2009)..

Lu, Y. F. et al. Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation.J. Exp. Theor. Phys. Lett.72, 457–459 (2000)..

Chen, Z. G., Taflove, A.&Backman, V. Photonic nanojet enhancement of backscattering of light by nanoparticles: a potential novel visible-light ultramicroscopy technique.Opt. Express12, 1214–1220 (2004)..

Murray, T. A.&Levene, M. J. Singlet gradient index lens for deep in vivo multiphoton microscopy.J. Biomed. Opt.17, 021106 (2012)..

Moore, D. T. Gradient-index optics: a review.Appl. Opt.19, 1035–1038 (1980)..

Luneburg, R. K.Mathematical Theory of Optics(University of California Press, Berkeley, US, 1964).

Zhao, Y. Y. et al. Three-dimensional Luneburg lens at optical frequencies.Laser Photonics Rev.10, 665–672 (2016)..

McKinnon, W. R. et al. Extracting coupling and loss coefficients from a ring resonator.Opt. Express17, 18971–18982 (2009)..

Bahadori, M. et al. High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform.Opt. Express27, 22025–22039 (2019)..

Arbabi, A. et al. Realization of a narrowband single wavelength microring mirror.Appl. Phys. Lett.99, 091105 (2011)..

Prevedel, R. et al. Simultaneous whole-animal 3D imaging of neuronal activity using light-field microscopy.Nat. Methods11, 727–730 (2014)..

Chambonneau, M. et al. Writing waveguides inside monolithic crystalline silicon with nanosecond laser pulses.Opt. Lett.41, 4875–4878 (2016)..

Davis, K. M. et al. Writing waveguides in glass with a femtosecond laser.Opt. Lett.21, 1729–1731 (1996)..

Zipfel, W. R., Williams, R. M.&Webb, W. W. Nonlinear magic: multiphoton microscopy in the biosciences.Nat. Biotechnol.21, 1369–1377 (2003)..

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