Low-loss metasurface optics down to the deep ultraviolet region

Cheng Zhang; Shawn Divitt; Qingbin Fan; Wenqi Zhu; Amit Agrawal; Yanqing Lu; Ting Xu; Henri J. Lezec

doi:10.1038/s41377-020-0287-y

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Low-loss metasurface optics down to the deep ultraviolet region

Original Articles

- Low-loss metasurface optics down to the deep ultraviolet region
- Low-loss metasurface optics down to the deep ultraviolet region
- LSA 2020年9卷第3期页码：574-583
- Affiliations：
  
  1.School of Optical and Electronic Information & Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, 430074 Wuhan, China
  2.Physical Measurement Laboratory, National Institute of Standards and Technology, 20899 Gaithersburg, MD, USA
  3.Maryland Nanocenter, University of Maryland, College Park, MD 20742, USA
  4.National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, 210093 Nanjing, China
- Author bio：
  
  Cheng Zhang (cheng.zhang@hust.edu.cn)
  Ting Xu (xuting@nju.edu.cn)
  Henri J. Lezec (henri.lezec@nist.gov)
- Funds：
- DOI：10.1038/s41377-020-0287-y
  中图分类号：
- 纸质出版日期：2020，
  
  网络出版日期：2020-04-09，
  
  收稿日期：2019-12-01，
  
  修回日期：2020-02-25，
  
  录用日期：2020-03-11
- Accepted：
Scan QR Code
Low-loss metasurface optics down to the deep ultraviolet region[J]. LSA, 2020,9(3):574-583.

Zhang, C. et al. Low-loss metasurface optics down to the deep ultraviolet region. Light: Science & Applications, 9, 574-583 (2020).
Low-loss metasurface optics down to the deep ultraviolet region[J]. LSA, 2020,9(3):574-583. DOI： 10.1038/s41377-020-0287-y.

Zhang, C. et al. Low-loss metasurface optics down to the deep ultraviolet region. Light: Science & Applications, 9, 574-583 (2020). DOI： 10.1038/s41377-020-0287-y.

摘要

Abstract

Shrinking conventional optical systems to chip-scale dimensions will benefit custom applications in imaging

displaying

sensing

spectroscopy

and metrology. Towards this goal

metasurfaces—planar arrays of subwavelength electromagnetic structures that collectively mimic the functionality of thicker conventional optical elements—have been exploited at frequencies ranging from the microwave range up to the visible range. Here

we demonstrate high-performance metasurface optical components that operate at ultraviolet wavelengths

including wavelengths down to the record-short deep ultraviolet range

and perform representative wavefront shaping functions

namely

high-numerical-aperture lensing

accelerating beam generation

and hologram projection. The constituent nanostructured elements of the metasurfaces are formed of hafnium oxide—a loss-less

high-refractive-index dielectric material deposited using low-temperature atomic layer deposition and patterned using high-aspect-ratio Damascene lithography. This study opens the way towards low-form factor

multifunctional ultraviolet nanophotonic platforms based on flat optical components

enabling diverse applications including lithography

imaging

spectroscopy

and quantum information processing.

关键词

Keywords

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