High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse

Tingting Zou; Bo Zhao; Wei Xin; Ye Wang; Bin Wang; Xin Zheng; Hongbo Xie; Zhiyu Zhang; Jianjun Yang; Chunlei Guo

doi:10.1038/s41377-020-0311-2

Go to Nature Website

Your Location：

Home >

Browse articles >

High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse

Original Articles

- High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse
- High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse
- LSA 2020年9卷第3期页码：697-707
- Affiliations：
  
  1.State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 130033 Changchun, China
  2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, 100049 Beijing, China
  3.Department of Electronic Information and Physics, Changzhi University, 046011 Changzhi, China
  4.Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics (CIOMP), Chinese Academy of Sciences (CAS), 130033 Changchun, China
  5.The Institute of Optics, University of Rochester, Rochester, NY 14627, USA
- Author bio：
  
  Wei Xin (weixin@ciomp.ac.cn)
  Jianjun Yang(jjyang@ciomp.ac.cn)
  Chunlei Guo (chunlei.guo@rochester.edu)
- Funds：
- DOI：10.1038/s41377-020-0311-2
  中图分类号：
- 纸质出版日期：2020，
  
  网络出版日期：2020-04-26，
  
  收稿日期：2019-12-16，
  
  修回日期：2020-04-01，
  
  录用日期：2020-04-07
- Accepted：
Scan QR Code
High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse[J]. LSA, 2020,9(3):697-707.

Zou, T. T. et al. High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse. Light: Science & Applications, 9, 697-707 (2020).
High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse[J]. LSA, 2020,9(3):697-707. DOI： 10.1038/s41377-020-0311-2.

Zou, T. T. et al. High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse. Light: Science & Applications, 9, 697-707 (2020). DOI： 10.1038/s41377-020-0311-2.

摘要

Abstract

Micro/nanoprocessing of graphene surfaces has attracted significant interest for both science and applications due to its effective modulation of material properties

which

however

is usually restricted by the disadvantages of the current fabrication methods. Here

by exploiting cylindrical focusing of a femtosecond laser on graphene oxide (GO) films

we successfully produce uniform subwavelength grating structures at high speed along with a simultaneous in situ photoreduction process. Strikingly

the well-defined structures feature orientations parallel to the laser polarization and significant robustness against distinct perturbations. The proposed model and simulations reveal that the structure formation is based on the transverse electric (TE) surface plasmons triggered by the gradient reduction of the GO film from its surface to the interior

which eventually results in interference intensity fringes and spatially periodic interactions. Further experiments prove that such a regular structured surface can cause enhanced optical absorption (> 20%) and an anisotropic photoresponse (~0.46 ratio) for the reduced GO film. Our work not only provides new insights into understanding the laser-GO interaction but also lays a solid foundation for practical usage of femtosecond laser plasmonic lithography

with the prospect of expansion to other two-dimensional materials for novel device applications.

关键词

Keywords

references

Georgakilas, V. et al. Noncovalent functionalization of graphene and graphene oxide for energy materials, biosensing, catalytic, and biomedical applications.Chem. Rev.116, 5464-5519 (2016)..

Compton, O. C.&Nguyen, S. T. Graphene oxide, highly reduced graphene oxide, and graphene: versatile building blocks for carbon-based materials.Small6, 711-723 (2010)..

Patchkovskii, S. et al. Graphene nanostructures as tunable storage media for molecular hydrogen.Proc. Natl Acad. Sci. USA102, 10439-10444 (2005)..

Han, N. et al. Improved heat dissipation in gallium nitride light-emitting diodes with embedded graphene oxide pattern.Nat. Commun.4, 1452 (2013)..

Lin, H. et al. A 90-nm-thick graphene metamaterial for strong and extremely broadband absorption of unpolarized light.Nat. Photonics13, 270-276 (2019)..

Yan, H. G. et al. Damping pathways of mid-infrared plasmons in graphene nanostructures.Nat. Photonics7, 394-399 (2013)..

Ju, L. et al. Graphene plasmonics for tunable terahertz metamaterials.Nat. Nanotechnol.6, 630-634 (2011)..

Gomez-Diaz, J. S., Tymchenko, M.&Alù, A. Hyperbolic metasurfaces: surface plasmons, light-matter interactions, and physical implementation using graphene strips [Invited].Optical Mater. Express5, 2313-2329 (2015)..

Liu, Z. M. et al. Three-dimensional self-organization in nanocomposite layered systems by ultrafast laser pulses.ACS Nano11, 5031-5040 (2017)..

Guo, L. J. Nanoimprint lithography: methods and material requirements.Adv. Mater.19, 495-513 (2007)..

Tokel, O. et al. In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon.Nat. Photonics11, 639-645 (2017)..

Zheng, X. R. et al. Patterning metal contacts on monolayer MoS2with vanishing Schottky barriers using thermal nanolithography.Nat. Electron.2, 17-25 (2019)..

Garcia, R., Knoll, A. W.&Riedo, E. Advanced scanning probe lithography.Nat. Nanotechnol.9, 577-587 (2014)..

Vorobyev, A. Y.&Guo, C. L. Direct femtosecond laser surface nano/microstructuring and its applications.Laser Photonics Rev.7, 385-407 (2013)..

Zhang, Y. L. et al. Direct imprinting of microcircuits on graphene oxides film by femtosecond laser reduction.Nano Today5, 15-20 (2010)..

Zheng, X. R. et al. Highly efficient and ultra-broadband graphene oxide ultrathin lenses with three-dimensional subwavelength focusing.Nat. Commun.6, 8433 (2015)..

Gengler, R. Y. N. et al. Revealing the ultrafast process behind the photoreduction of graphene oxide.Nat. Commun.4, 2560 (2013)..

Strong, V. et al. Patterning and electronic tuning of laser scribed graphene for flexible all-carbon devices.ACS Nano6, 1395-1403 (2012)..

Guo, L. et al. Two-beam-laser interference mediated reduction, patterning and nanostructuring of graphene oxide for the production of a flexible humidity sensing device.Carbon50, 1667-1673 (2012)..

Birnbaum, M. Semiconductor surface damage produced by ruby lasers.J. Appl. Phys.36, 3688-3689 (1965)..

Bonse, J. et al. Laser-induced periodic surface structures—a scientific evergreen.IEEE J. Sel. Top. Quantum Electron.23, 9000615 (2017)..

Öktem, B. et al. Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses.Nat. Photonics7, 897-901 (2013)..

Wang, L. et al. Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing.Light Sci. Appl.6, e17112 (2017)..

Huang, J. et al. Cylindrically focused nonablative femtosecond laser processing of long-range uniform periodic surface structures with tunable diffraction efficiency.Adv. Opt. Mater.7, 1900706 (2019)..

Huang, J. et al. Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification.Nanophotonics8, 869-878 (2019)..

Sidhu, M. S., Munjal, P.&Singh, K. P. High-fidelity large area nano-patterning of silicon with femtosecond light sheet.Appl. Phys. A124, 46 (2018)..

Huang, M. et al. Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser.ACS Nano3, 4062-4070 (2009)..

Shvartzburg, A., Petite, G.&Auby, N.S-polarized surface electromagnetic waves in inhomogeneous media: exactly solvable models.J. Opt. Soc. Am. B16, 966-970 (1999)..

Kim, K. Excitation of s-polarized surface electromagnetic waves in inhomogeneous dielectric media.Opt. Express16, 13354-13363 (2008)..

Sun, Z. J. et al. Artificial TE-mode surface waves at metal surfaces mimicking surface plasmons.Opt. Express22, 4714-4722 (2014)..

Chitara, B. et al. Infrared photodetectors based on reduced graphene oxide and graphene nanoribbons.Adv. Mater.23, 5419-5424 (2011)..

Cao, Y. et al. Fully suspended reduced graphene oxide photodetector with annealing temperature-dependent broad spectral binary photoresponses.ACS Photonics4, 2797-2806 (2017)..

Yao, H. B. et al. Direct fabrication of photoconductive patterns on LBL assembled graphene oxide/PDDA/titania hybrid films by photothermal and photocatalytic reduction.J. Mater. Chem.20, 5190-5195 (2010)..

Flanders, D. C. Submicrometer periodicity gratings as artificial anisotropic dielectrics.Appl. Phys. Lett.42, 492-494 (1983)..

Xin, W. et al. Black-phosphorus-based orientation-induced diodes.Adv. Mater.30, 1704653 (2018)..

Island, J. O. et al. TiS3transistors with tailored morphology and electrical properties.Adv. Mater.27, 2595-2601 (2015)..

You, R. et al. Laser fabrication of graphene-based flexible electronics.Adv. Mater.n/a, 1901981 (2019)..

Jiang, H. B. et al. Review of photoreduction and synchronous patterning of graphene oxide toward advanced applications.J. Mater. Sci.55, 480-497 (2020)..

Zhang, Y. L. et al. A "Yin"-"Yang" complementarity strategy for design and fabrication of dual-responsive bimorph actuators.Nano Energy68, 104302 (2020)..

Hummers, W. S. Jr&Offeman, R. E. Preparation of graphitic oxide.J. Am. Chem. Soc.80, 1339 (1958)..

Jiang, W. S. et al. Reduced graphene oxide-based optical sensor for detecting specific protein.Sens. Actuators B249, 142-148 (2017)..

Gnilitskyi, I. et al. High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity.Sci. Rep.7, 8485 (2017)..

Kymakis, E. et al. Flexible organic photovoltaic cells with in situ nonthermal photoreduction of spin-coated graphene oxide electrodes.Adv. Funct. Mater.23, 2742-2749 (2013)..

Tian, H. et al. Cost-effective, transfer-free, flexible resistive random access memory using laser-scribed reduced graphene oxide patterning technology.Nano Lett.14, 3214-3219 (2014)..

Lin, J. et al. Laser-induced porous graphene films from commercial polymers.Nat. Commun.5, 5714 (2014)..

Gao, W. L. et al. Excitation of plasmonic waves in graphene by guided-mode resonances.ACS Nano6, 7806-7813 (2012)..

Beltaos, A. et al. Femtosecond laser induced periodic surface structures on multi-layer graphene.J. Appl. Phys.116, 204306 (2014)..

Kasischke, M. et al. Simultaneous nanopatterning and reduction of graphene oxide by femtosecond laser pulses.Appl. Surf. Sci.445, 197-203 (2018)..

Ren, H. Y. et al. Hierarchical graphene foam for efficient omnidirectional solar-thermal energy conversion.Adv. Mater.29, 1702590 (2017)..

Xie, C. et al. Photodetectors based on two-dimensional layered materials beyond graphene.Adv. Funct. Mater.27, 1603886 (2017)..

Jalil, S. A. et al. Formation of controllable 1D and 2D periodic surface structures on cobalt by femtosecond double pulse laser irradiation.Appl. Phys. Lett.115, 031601 (2019)..

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

暂无数据