Phase characterisation of metalenses

Maoxiong Zhao; Mu Ku Chen; Ze-Peng Zhuang; Yiwen Zhang; Ang Chen; Qinmiao Chen; Wenzhe Liu; Jiajun Wang; Ze-Ming Chen; Bo Wang; Xiaohan Liu; Haiwei Yin; Shumin Xiao; Lei Shi; Jian-Wen Dong; Jian Zi; Din Ping Tsai

doi:10.1038/s41377-021-00492-y

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Phase characterisation of metalenses

Articles

- Phase characterisation of metalenses
- Phase characterisation of metalenses
- LSA 2021年10卷第4期页码：551-561
- Affiliations：
  
  1.State Key Laboratory of Surface Physics, Key Laboratory of Micro- and NanoPhotonic Structures (Ministry of Education) and Department of Physics, Fudan University, 200433 Shanghai, China
  2.Department of Electronic and Information Engineering, The Hong Kong Polytechnic University, 999077 Hong Kong, China
  3.School of Physics and State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, 510275 Guangzhou, China
  4.Shanghai Engineering Research Center of Optical Metrology for Nanofabrication (SERCOM), 200433 Shanghai, China
  5.State Key Laboratory on Tunable Laser Technology, Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Shenzhen Graduate School, Harbin Institute of Technology, 518055 Shenzhen, China
- Author bio：
  
  Lei Shi (lshi@fudan.edu.cn)
  Jian-Wen Dong (dongjwen@mail.sysu.edu.cn)
  Jian Zi (jzi@fudan.edu.cn)
  Din Ping Tsai (dinping.tsai@polyu.edu.hk)
- Funds：
- DOI：10.1038/s41377-021-00492-y
  中图分类号：
- 纸质出版日期：2021-04-30，
  
  网络出版日期：2021-03-10，
  
  收稿日期：2020-10-05，
  
  修回日期：2021-02-11，
  
  录用日期：2021-02-16
- Accepted：
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Phase characterisation of metalenses[J]. LSA, 2021,10(4):551-561.

Zhao, M. X. et al. Phase characterisation of metalenses. Light: Science & Applications, 10, 551-561 (2021).
Phase characterisation of metalenses[J]. LSA, 2021,10(4):551-561. DOI： 10.1038/s41377-021-00492-y.

Zhao, M. X. et al. Phase characterisation of metalenses. Light: Science & Applications, 10, 551-561 (2021). DOI： 10.1038/s41377-021-00492-y.

摘要

Abstract

Metalenses have emerged as a new optical element or system in recent years

showing superior performance and abundant applications. However

the phase distribution of a metalens has not been measured directly up to now

hindering further quantitative evaluation of its performance. We have developed an interferometric imaging phase measurement system to measure the phase distribution of a metalens by taking only one photo of the interference pattern. Based on the measured phase distribution

we analyse the negative chromatic aberration effect of monochromatic metalenses and propose a feature size of metalenses. Different sensitivities of the phase response to wavelength between the Pancharatnam-Berry phase-based metalens and propagation phase-reliant metalens are directly observed in the experiment. Furthermore

through phase distribution analysis

it is found that the distance between the measured metalens and the brightest spot of focusing will deviate from the focal length when the metalens has a low nominal numerical aperture

even though the metalens is ideal without any fabrication error. We also use the measured phase distribution to quantitatively characterise the imaging performance of the metalens. Our phase measurement system will help not only designers optimise the designs of metalenses but also fabricants distinguish defects to improve the fabrication process

which will pave the way for metalenses in industrial applications.

关键词

Keywords

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