Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

Hongchang Wang; Simone Moriconi; Kawal Sawhney

doi:10.1038/s41377-021-00632-4

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Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

Articles

- Nano-precision metrology of X-ray mirrors with laser speckle angular measurement
- Nano-precision metrology of X-ray mirrors with laser speckle angular measurement
- LSA 2021年10卷第10期页码：1915-1927
- Affiliations：
  
  1.Diamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot, OX11 0DE, UK
  2.Department of Engineering Science, University of Oxford, Parks Road, Oxford, OX1 3PJ, UK
- Author bio：
  
  Hongchang Wang (hongchang.wang@diamond.ac.uk)
- Funds：
- DOI：10.1038/s41377-021-00632-4
  中图分类号：
- 纸质出版日期：2021-10-31，
  
  网络出版日期：2021-09-22，
  
  收稿日期：2021-04-26，
  
  修回日期：2021-08-16，
  
  录用日期：2021-09-03
- Accepted：
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Nano-precision metrology of X-ray mirrors with laser speckle angular measurement[J]. LSA, 2021,10(10):1915-1927.

Wang H. C. et al. Metasurface interferometry toward quantum sensors. Light: Science & Applications, 10, 1915-1927 (2021).
Nano-precision metrology of X-ray mirrors with laser speckle angular measurement[J]. LSA, 2021,10(10):1915-1927. DOI： 10.1038/s41377-021-00632-4.

Wang H. C. et al. Metasurface interferometry toward quantum sensors. Light: Science & Applications, 10, 1915-1927 (2021). DOI： 10.1038/s41377-021-00632-4.

摘要

Abstract

X-ray mirrors are widely used for synchrotron radiation

free-electron lasers

and astronomical telescopes. The short wavelength and grazing incidence impose strict limits on the permissible slope error. Advanced polishing techniques have already produced mirrors with slope errors below 50 nrad root mean square (rms)

but existing metrology techniques struggle to measure them. Here

we describe a laser speckle angular measurement (SAM) approach to overcome such limitations. We also demonstrate that the angular precision of slope error measurements can be pushed down to 20nrad rms by utilizing an advanced sub-pixel tracking algorithm. Furthermore

SAM allows the measurement of mirrors in two dimensions with radii of curvature as low as a few hundred millimeters. Importantly

the instrument based on SAM is compact

low-cost

and easy to integrate with most other existing X-ray mirror metrology instruments

such as the long trace profiler (LTP) and nanometer optical metrology (NOM). The proposed nanometrology method represents an important milestone and potentially opens up new possibilities to develop next-generation super-polished X-ray mirrors

which will advance the development of X-ray nanoprobes

coherence preservation

and astronomical physics.

关键词

Keywords

references

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