Microspheres give improved resolution in nondestructive examination of semiconductor devices

R. C. Woods

doi:10.1038/s41377-022-00747-2

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Microspheres give improved resolution in nondestructive examination of semiconductor devices

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- Microspheres give improved resolution in nondestructive examination of semiconductor devices
- Microspheres give improved resolution in nondestructive examination of semiconductor devices
- LSA 2022年11卷第3期页码：302-303
- Affiliations：
  
  College of Engineering, University of South Alabama, Mobile, AL, USA
- Author bio：
  
  R. C. Woods (clivewoods@southalabama.edu)
- Funds：
- DOI：10.1038/s41377-022-00747-2
  中图分类号：
- 纸质出版日期：2022-03-31，
  
  网络出版日期：2022-03-16，
- Accepted：
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Microspheres give improved resolution in nondestructive examination of semiconductor devices[J]. LSA, 2022,11(3):302-303.

Woods, R. C. Microspheres give improved resolution in nondestructive examination of semiconductor devices. Light: Science & Applications, 11, 302-303 (2022).
Microspheres give improved resolution in nondestructive examination of semiconductor devices[J]. LSA, 2022,11(3):302-303. DOI： 10.1038/s41377-022-00747-2.

Woods, R. C. Microspheres give improved resolution in nondestructive examination of semiconductor devices. Light: Science & Applications, 11, 302-303 (2022). DOI： 10.1038/s41377-022-00747-2.

摘要

Abstract

The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light: Science and Applications article that using an additional glass microsphere in the optical path can improve the resolution significantly.

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references

Davidson, M. W. Ernst Abbe. [2022-01-16]athttps://micro.magnet.fsu.edu/optics/timeline/people/abbe.htmlhttps://micro.magnet.fsu.edu/optics/timeline/people/abbe.html

Li, L. et al. Label-free super-resolution imaging of adenoviruses by submerged microsphere optical nanoscopy.Light. : Sci. Appl.2, e104 (2013)..

Yang, H. et al. Super-resolution imaging of a dielectric microsphere is governed by the waist of its photonic nanojet.Nano Lett.16, 4862-4870 (2016)..

Geints, Y. E., Zemlyanov, A. A.&Panina, E. K. Photonic jets from resonantly excited transparent dielectric microspheres.J. Optical Soc. Am. B29, 758-762 (2012)..

Kassamakov, I. et al. 3d Super-resolution optical profiling using microsphere enhanced mirau interferometry.Sci. Rep.7, 3683 (2017)..

Yu, L. Y., Cyue, Z. R.&Su, G. D. J. Three-stage full-wave simulation architecture for in-depth analysis of microspheres in microscopy.Opt. Express28, 8862-8877 (2020)..

Kwon, S. et al. Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices.Light. : Sci. Appl.11, 32 (2022)..

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