Advances in cost-effective integrated spectrometers

Ang Li; Chunhui Yao; Junfei Xia; Huijie Wang; Qixiang Cheng; Richard Penty; Yeshaiahu Fainman; Shilong Pan

doi:10.1038/s41377-022-00853-1

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Advances in cost-effective integrated spectrometers

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- Advances in cost-effective integrated spectrometers
- Advances in cost-effective integrated spectrometers
- Light: Science & Applications 2022年11卷第7期页码：1379-1396
- Affiliations：
  
  1.Key Laboratory of Radar Imaging and Microwave Photonics, Ministry of Education, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China
  2.Litin Technology, Xuzhou, Jiangsu, China
  3.Department of Engineering, University of Cambridge, 9 JJ Thomson Avenue, Cambridge, CB3 0FA, UK
  4.College of Automation Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China
  5.Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, CA, USA
- Author bio：
  
  Qixiang Cheng (qc223@cam.ac.uk)
  Yeshaiahu Fainman (fainman@ucsd.edu)
  Shilong Pan (pans@nuaa.edu.cn)
- Funds：
- DOI：10.1038/s41377-022-00853-1
  中图分类号：
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Ang Li, Chunhui Yao, Junfei Xia, 等. Advances in cost-effective integrated spectrometers[J]. Light: Science & Applications, 2022,11(7):1379-1396.

Li, A. et al. Advances in cost-effective integrated spectrometers. Light: Science & Applications, 11, 1379-1396 (2022).
Ang Li, Chunhui Yao, Junfei Xia, 等. Advances in cost-effective integrated spectrometers[J]. Light: Science & Applications, 2022,11(7):1379-1396. DOI： 10.1038/s41377-022-00853-1.

Li, A. et al. Advances in cost-effective integrated spectrometers. Light: Science & Applications, 11, 1379-1396 (2022). DOI： 10.1038/s41377-022-00853-1.

摘要

Abstract

The proliferation of Internet-of-Things has promoted a wide variety of emerging applications that require compact, lightweight, and low-cost optical spectrometers. While substantial progresses have been made in the miniaturization of spectrometers, most of them are with a major focus on the technical side but tend to feature a lower technology readiness level for manufacturability. More importantly, in spite of the advancement in miniaturized spectrometers, their performance and the metrics of real-life applications have seldomly been connected but are highly important. This review paper shows the market trend for chip-scale spectrometers and analyzes the key metrics that are required to adopt miniaturized spectrometers in real-life applications. Recent progress addressing the challenges of miniaturization of spectrometers is summarized, paying a special attention to the CMOS-compatible fabrication platform that shows a clear pathway to massive production. Insights for ways forward are also presented.

关键词

Keywords

references

N. Savage . Spectrometers . Nat. Photonics , 2009 . 3 601 -602 . DOI:10.1038/nphoton.2009.185http://doi.org/10.1038/nphoton.2009.185.

C. P. Bacon , Y. Mattley , R. DeFrece . Miniature spectroscopic instrumentation: applications to biology and chemistry . Rev. Sci. Instrum. , 2004 . 75 1 -16 . DOI:10.1063/1.1633025http://doi.org/10.1063/1.1633025 .

A. W. Chow . Lab-on-a-chip: opportunities for chemical engineering . AIChE J. , 2002 . 48 1590 -1595 . DOI:10.1002/aic.690480802http://doi.org/10.1002/aic.690480802 .

R. A. Crocombe . Portable spectroscopy . Appl. Spectrosc. , 2018 . 72 1701 -1751 . DOI:10.1177/0003702818809719http://doi.org/10.1177/0003702818809719 .

A. J. S. McGonigle , 等 . Smartphone spectrometers . Sensors , 2018 . 18 223 DOI:10.3390/s18010223http://doi.org/10.3390/s18010223 .

T. Hakala , 等 . Direct reflectance measurements from drones: sensor absolute radiometric calibration and system tests for forest reflectance characterization . Sensors , 2018 . 18 1417 DOI:10.3390/s18051417http://doi.org/10.3390/s18051417 .

N. Blind , 等 . Spectrographs for astrophotonics . Opt. Express , 2017 . 25 27341 -27369 . DOI:10.1364/OE.25.027341http://doi.org/10.1364/OE.25.027341 .

He, Z. P., Shu, R. & Wang, J. Y. Imaging spectrometer based on AOTF and its prospects in deep-space exploration application. In Proceedings of SPIE 8196, International Symposium on Photoelectronic Detection and Imaging (SPIE, Beijing, 2011).

Kulakowski, J. & d'Humières, B. Chip-size spectrometers drive spectroscopy towards consumer and medical applications. In Proceedings of SPIE 11693, Photonic Instrumentation Engineering VIII (SPIE, 2021).

Fraunhofer. Miniature spectrometer for the smartphone (Fraunhofer-Gesellschaft, 2021). https://www.fraunhofer.de/en/press/research-news/2021/july-2021/miniature-spectrometer-for-the-smartphone.htmlhttps://www.fraunhofer.de/en/press/research-news/2021/july-2021/miniature-spectrometer-for-the-smartphone.html.

Rockley Photonics. Real-time, non-invasive biomarker sensing on the wrist. https://rockleyphotonics.com/wp-content/uploads/2021/07/Rockley-Photonics-Biomarker-Sensing-on-the-Wrist.pdfhttps://rockleyphotonics.com/wp-content/uploads/2021/07/Rockley-Photonics-Biomarker-Sensing-on-the-Wrist.pdf (2021).

Z. Y. Yang , 等 . Miniaturization of optical spectrometers . Science , 2021 . 371 eabe0722 DOI:10.1126/science.abe0722http://doi.org/10.1126/science.abe0722 .

B. Redding , 等 . Compact spectrometer based on a disordered photonic chip . Nat. Photonics , 2013 . 7 746 -751 . DOI:10.1038/nphoton.2013.190http://doi.org/10.1038/nphoton.2013.190 .

Z. Y. Yang , 等 . Single-nanowire spectrometers . Science , 2019 . 365 1017 -1020 . DOI:10.1126/science.aax8814http://doi.org/10.1126/science.aax8814 .

H. J. Wang , 等 . On-chip Fourier transform spectrometers by dual-polarized detection . Opt. Lett. , 2019 . 44 2923 -2926 . DOI:10.1364/OL.44.002923http://doi.org/10.1364/OL.44.002923 .

M. C. M. M. Souza , 等 . Fourier transform spectrometer on silicon with thermo-optic non-linearity and dispersion correction . Nat. Commun. , 2018 . 9 665 DOI:10.1038/s41467-018-03004-6http://doi.org/10.1038/s41467-018-03004-6 .

A. Li , Y. Fainman . Integrated silicon Fourier transform spectrometer with broad bandwidth and ultra-high resolution . Laser Photonics Rev. , 2021 . 15 2000358 DOI:10.1002/lpor.202000358http://doi.org/10.1002/lpor.202000358 .

J. Bao , M. G. Bawendi . A colloidal quantum dot spectrometer . Nature , 2015 . 523 60 -70 . DOI:10.1038/nature14576http://doi.org/10.1038/nature14576 .

X. X. Zhu , 等 . Broadband perovskite quantum dot spectrometer beyond human visual resolution . Light.: Sci. Appl. , 2020 . 9 73 DOI:10.1038/s41377-020-0301-4http://doi.org/10.1038/s41377-020-0301-4 .

A. Li , Y. Fainman . On-chip spectrometers using stratified waveguide filters . Nat. Commun. , 2021 . 12 2704 DOI:10.1038/s41467-021-23001-6http://doi.org/10.1038/s41467-021-23001-6 .

R. Soref . The past, present, and future of silicon photonics . IEEE J. Sel. Top. Quantum Electron. , 2006 . 12 1678 -1687 . DOI:10.1109/JSTQE.2006.883151http://doi.org/10.1109/JSTQE.2006.883151 .

S. Khan , 等 . Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics . Appl. Phys. Lett. , 2013 . 102 121104 DOI:10.1063/1.4798557http://doi.org/10.1063/1.4798557 .

H. J. Yang , 等 . Transfer-printed stacked nanomembrane lasers on silicon . Nat. Photonics , 2012 . 6 615 -620 . DOI:10.1038/nphoton.2012.160http://doi.org/10.1038/nphoton.2012.160 .

S. M. Chen . Electrically pumped continuous-wave Ⅲ–Ⅴ quantum dot lasers on silicon . Nat. Photonics , 2016 . 10 307 -311 . DOI:10.1038/nphoton.2016.21http://doi.org/10.1038/nphoton.2016.21 .

J. Kulakowski , B. d'Humières . Compact spectrometers: technologies, market trends and needs . PhotonicsViews , 2021 . 18 28 -30 . DOI:10.1002/phvs.202170108http://doi.org/10.1002/phvs.202170108 .

High sensitivity in the near infrared region (to 1050 nm), ultra-compact grating type spectrometer. https://www.hamamatsu.com/eu/en/product/type/C14384MA-01/index.htmlhttps://www.hamamatsu.com/eu/en/product/type/C14384MA-01/index.html (2019).

Kulakowski, J. & d'Humières, B. Miniature, micro and chip-size spectrometers: technologies, market trends and customers' needs (Tematys, 2020).

NeoSpectra-Micro spectral FT-IR sensor. https://www.photonicsolutions.co.uk/product-detail.php?prod=6815https://www.photonicsolutions.co.uk/product-detail.php?prod=6815 (2022).

Ikoba, J. J. Samsung patents a smartphone-embedded IR Spectrometer; could be on the Galaxy S11. https://www.gizmochina.com/2019/10/01/samsung-patents-a-smartphone-embedded-ir-spectrometer-could-be-on-the-galaxy-s11/https://www.gizmochina.com/2019/10/01/samsung-patents-a-smartphone-embedded-ir-spectrometer-could-be-on-the-galaxy-s11/ (2019).

S. F. Malin , 等 . Noninvasive prediction of glucose by near-infrared diffuse reflectance spectroscopy . Clin. Chem. , 1999 . 45 1651 -1658 . DOI:10.1093/clinchem/45.9.1651http://doi.org/10.1093/clinchem/45.9.1651 .

Y. Uwadaira , 等 . Development of a non-invasive blood glucose sensor using short-wavelength near-infrared spectroscopy and its application to glycemic index determination . Nippon Shokuhin Kagaku Kogaku Kaishi , 2011 . 58 97 -104 . DOI:10.3136/nskkk.58.97http://doi.org/10.3136/nskkk.58.97 .

H. Ahn , 等 . Emerging optical spectroscopy techniques for biomedical applications—a brief review of recent progress . Appl. Spectrosc. Rev. , 2018 . 53 264 -278 . DOI:10.1080/05704928.2017.1324877http://doi.org/10.1080/05704928.2017.1324877 .

D. R. Parachalil , 等 . Analysis of bodily fluids using vibrational spectroscopy: a direct comparison of Raman scattering and infrared absorption techniques for the case of glucose in blood serum . Analyst , 2019 . 144 3334 -3346 . DOI:10.1039/C9AN00125Ehttp://doi.org/10.1039/C9AN00125E .

X. Y. Zhou , 等 . Nanomaterial-based gas sensors used for breath diagnosis . J. Mater. Chem. B , 2020 . 8 3231 -3248 . DOI:10.1039/C9TB02518Ahttp://doi.org/10.1039/C9TB02518A .

Metrohm NIRSystems. A guide to near-infrared spectroscopic analysis of industrial manufacturing processes (Spring, 2013).

S. Türker-Kaya , C. W. Huck . A review of mid-infrared and near-infrared imaging: principles, concepts and applications in plant tissue analysis . Molecules , 2017 . 22 168 DOI:10.3390/molecules22010168http://doi.org/10.3390/molecules22010168 .

R. Henn , 等 . Hemodialysis monitoring using mid- and near-infrared spectroscopy with partial least squares regression . J. Biophotonics , 2018 . 11 e201700365 DOI:10.1002/jbio.201700365http://doi.org/10.1002/jbio.201700365 .

Y. Uwadaira , 等 . Identification of informative bands in the short-wavelength NIR region for non-invasive blood glucose measurement . Biomed. Opt. Express , 2016 . 7 2729 -2737 . DOI:10.1364/BOE.7.002729http://doi.org/10.1364/BOE.7.002729 .

J. T. Xue , 等 . Noninvasive and fast measurement of blood glucose in vivo by near infrared (NIR) spectroscopy . Spectrochimica Acta Part A Mol. Biomolecular Spectrosc. , 2017 . 179 250 -254 . DOI:10.1016/j.saa.2017.02.032http://doi.org/10.1016/j.saa.2017.02.032 .

H. M. Heise , 等 . Noninvasive blood glucose sensors based on near-infrared spectroscopy . Artif. Organs , 1994 . 18 439 -447 . DOI:10.1111/j.1525-1594.1994.tb02230.xhttp://doi.org/10.1111/j.1525-1594.1994.tb02230.x .

J. J. Burmeister , M. A. Arnold , G. W. Small . Noninvasive blood glucose measurements by near-infrared transmission spectroscopy across human tongues . Diabetes Technol. Therapeutics , 2004 . 2 5 -16 . DOI:10.1089/152091500316683http://doi.org/10.1089/152091500316683 .

K. X. Xu , 等 . Non-invasive glucose sensing with near-infrared spectroscopy enhanced by optical measurement conditions reproduction technique . Opt. Lasers Eng. , 2005 . 43 1096 -1106 . DOI:10.1016/j.optlaseng.2004.06.018http://doi.org/10.1016/j.optlaseng.2004.06.018 .

Zuo, P. et al. Analysis of noninvasive measurement of human blood glucose with ANN-NIR spectroscopy. In Proceedings of 2005 international conference on neural networks and brain (IEEE, Beijing, 2005), 1350–1353.

C. D. Brown , 等 . Clinical assessment of near-infrared spectroscopy for noninvasive diabetes screening . Diabetes Technol. Therapeutics , 2005 . 7 456 -466 . DOI:10.1089/dia.2005.7.456http://doi.org/10.1089/dia.2005.7.456 .

E. Guevara , F. J. Gonzalez . Joint optical-electrical technique for noninvasive glucose monitoring . Rev. Mexicana De. F.íSci. , 2010 . 56 430 -434. .

D. Lafrance , L. C. Lands , D. H. Burns . Measurement of lactate in whole human blood with near-infrared transmission spectroscopy . Talanta , 2003 . 60 635 -641 . DOI:10.1016/S0039-9140(03)00042-0http://doi.org/10.1016/S0039-9140(03)00042-0 .

D. Lafrance , L. C. Lands , D. H. Burns . In vivo lactate measurement in human tissue by near-infrared diffuse reflectance spectroscopy . Vibrational Spectrosc. , 2004 . 36 195 -202 . DOI:10.1016/j.vibspec.2004.01.020http://doi.org/10.1016/j.vibspec.2004.01.020 .

S. Ramasahayam , S. R. Chowdhury . Non invasive estimation of blood urea concentration using near infrared spectroscopy . Int. J. Smart Sens. Intell. Syst. , 2016 . 9 449 -467. .

C. V. Eddy , M. A. Arnold . Near-infrared spectroscopy for measuring urea in hemodialysis fluids . Clin. Chem. , 2001 . 47 1279 -1286 . DOI:10.1093/clinchem/47.7.1279http://doi.org/10.1093/clinchem/47.7.1279 .

H. Chung , 等 . Simultaneous measurement of glucose and glutamine in aqueous solutions by near infrared spectroscopy . Appl. Biochem. Biotechnol. , 1995 . 50 109 -125 . DOI:10.1007/BF02783448http://doi.org/10.1007/BF02783448 .

M. Rhiel , 等 . Nondestructive near-infrared spectroscopic measurement of multiple analytes in undiluted samples of serum-based cell culture media . Biotechnol. Bioeng. , 2002 . 77 73 -82 . DOI:10.1002/bit.10093http://doi.org/10.1002/bit.10093 .

Cao, N. & Gao, T. X. Noninvasive tissue blood oxygenation measurement based on near infrared spectroscopy (NIRS). In Proceedings of the 2009 3rd International Conference on Bioinformatics and Biomedical Engineering (IEEE, Beijing, 2009), 1–4. https://doi.org/10.1109/ICBBE.2009.5163118.https://doi.org/10.1109/ICBBE.2009.5163118.

H. Ayaz , 等 . Early diagnosis of traumatic intracranial hematomas . J. Biomed. Opt. , 2019 . 24 051411 DOI:10.1117/1.JBO.24.5.051411http://doi.org/10.1117/1.JBO.24.5.051411 .

G. D. Doddridge , Z. Q. Shi . Multivariate figures of merit (FOM) investigation on the effect of instrument parameters on a Fourier transform-near infrared spectroscopy (FT-NIRS) based content uniformity method on core tablets . J. Pharm. Biomed. Anal. , 2015 . 102 535 -543 . DOI:10.1016/j.jpba.2014.10.019http://doi.org/10.1016/j.jpba.2014.10.019 .

E. Wiercigroch , 等 . Raman and infrared spectroscopy of carbohydrates: a review . Spectrochimica Acta Part A Mol. Biomolecular Spectrosc. , 2017 . 185 317 -335 . DOI:10.1016/j.saa.2017.05.045http://doi.org/10.1016/j.saa.2017.05.045 .

H. J. Wang , 等 . Note: a unibody NIR transmission probe for in situ liquid detection . Rev. Sci. Instrum. , 2018 . 89 036104 DOI:10.1063/1.5019188http://doi.org/10.1063/1.5019188 .

M. G. Li , 等 . Data fusion of Raman and near-infrared spectroscopies for the rapid quantitative analysis of methanol content in methanol–gasoline . Energy Fuels , 2019 . 33 12286 -12294 . DOI:10.1021/acs.energyfuels.9b03021http://doi.org/10.1021/acs.energyfuels.9b03021 .

L. Cabernard , 等 . Comparison of Raman and Fourier transform infrared spectroscopy for the quantification of microplastics in the aquatic environment . Environ. Sci. Technol. , 2018 . 52 13279 -13288 . DOI:10.1021/acs.est.8b03438http://doi.org/10.1021/acs.est.8b03438 .

K. C. Cossel , 等 . Open-path dual-comb spectroscopy to an airborne retroreflector . Optica , 2017 . 4 724 -728 . DOI:10.1364/OPTICA.4.000724http://doi.org/10.1364/OPTICA.4.000724 .

B. Campanella , V. Palleschi , S. Legnaioli . Introduction to vibrational spectroscopies . ChemTexts , 2021 . 7 5 DOI:10.1007/s40828-020-00129-4http://doi.org/10.1007/s40828-020-00129-4 .

S. Khan , S. Le Calvé , D. Newport . A review of optical interferometry techniques for VOC detection . Sens. Actuators A: Phys. , 2020 . 302 111782 DOI:10.1016/j.sna.2019.111782http://doi.org/10.1016/j.sna.2019.111782 .

J. Brouckaert , 等 . Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform . J. Lightwave Technol. , 2007 . 25 1269 -1275 . DOI:10.1109/JLT.2007.893025http://doi.org/10.1109/JLT.2007.893025 .

P. Pottier , M. J. Strain , M. Packirisamy . Integrated microspectrometer with elliptical Bragg mirror enhanced diffraction grating on silicon on insulator . ACS Photonics , 2014 . 1 430 -436 . DOI:10.1021/ph400165jhttp://doi.org/10.1021/ph400165j .

M. Muneeb , 等 . Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm . Opt. Express , 2013 . 21 11659 -11669 . DOI:10.1364/OE.21.011659http://doi.org/10.1364/OE.21.011659.

B. Momeni , 等 . An on-chip silicon grating spectrometer using a photonic crystal reflector . J. Opt. , 2010 . 12 035501 DOI:10.1088/2040-8978/12/3/035501http://doi.org/10.1088/2040-8978/12/3/035501 .

S. J. Xie , 等 . Silicon nitride/silicon dioxide echelle grating spectrometer for operation near 1.55 μm . IEEE Photonics J. , 2018 . 10 4502207 .

J. Brouckaert , 等 . Planar concave grating demultiplexer with high reflective Bragg reflector facets . IEEE Photonics Technol. Lett. , 2008 . 20 309 -311 . DOI:10.1109/LPT.2007.915585http://doi.org/10.1109/LPT.2007.915585 .

A. M. Taha , 等 . Compact MMI-based AWGs in a scalable monolithic silicon photonics platform . IEEE Photonics J. , 2021 . 13 6600306 DOI:10.1109/JPHOT.2021.3099436http://doi.org/10.1109/JPHOT.2021.3099436 .

D. X. Dai , 等 . Experimental demonstration of an ultracompact Si-nanowire-based reflective arrayed-waveguide grating (de)multiplexer with photonic crystal reflectors . Opt. Lett. , 2010 . 35 2594 -2596 . DOI:10.1364/OL.35.002594http://doi.org/10.1364/OL.35.002594 .

Q. Fang , 等 . Folded silicon-photonics arrayed waveguide grating integrated with loop-mirror reflectors . IEEE Photonics J. , 2018 . 10 4900508 .

S. Tondini , 等 . Methods for low crosstalk and wavelength tunability in arrayed-waveguide grating for on-silicon optical network . J. Lightwave Technol. , 2017 . 35 5134 -5141 . DOI:10.1109/JLT.2017.2768161http://doi.org/10.1109/JLT.2017.2768161 .

S. Pathak , 等 . Comparison of AWGs and echelle gratings for wavelength division multiplexing on silicon-on-insulator . IEEE Photonics J. , 2014 . 6 4900109 DOI:10.1109/JPHOT.2014.2361658http://doi.org/10.1109/JPHOT.2014.2361658 .

D. Munk , 等 . Eight-channel silicon-photonic wavelength division multiplexer with 17 GHz spacing . IEEE J. Sel. Top. Quantum Electron. , 2019 . 25 8300310 DOI:10.1109/JSTQE.2019.2904437http://doi.org/10.1109/JSTQE.2019.2904437 .

H. N. Xu , Y. C. Shi . Flat-top CWdM (de)multiplexer based on MZI with bent directional couplers . IEEE Photonics Technol. Lett. , 2018 . 30 169 -172 . DOI:10.1109/LPT.2017.2779489http://doi.org/10.1109/LPT.2017.2779489 .

J. A. Davis , 等 . Novel spectral-shaping building block: a narrowband Mach-Zehnder interferometer . Photonics Res. , 2020 . 8 1059 -1063 . DOI:10.1364/PRJ.391128http://doi.org/10.1364/PRJ.391128 .

A. Li , W. Bogaerts . Experimental demonstration of a single silicon ring resonator with an ultra-wide FSR and tuning range . Opt. Lett. , 2017 . 42 4986 -4989 . DOI:10.1364/OL.42.004986http://doi.org/10.1364/OL.42.004986 .

A. Li , W. Bogaerts . Using backscattering and backcoupling in silicon ring resonators as a new degree of design freedom . Laser Photonics Rev. , 2019 . 13 1800244 DOI:10.1002/lpor.201800244http://doi.org/10.1002/lpor.201800244 .

A. Li , 等 . Backscattering in silicon microring resonators: a quantitative analysis . Laser Photonics Rev. , 2016 . 10 420 -431 . DOI:10.1002/lpor.201500207http://doi.org/10.1002/lpor.201500207 .

Z. X. Xia , 等 . High resolution on-chip spectroscopy based on miniaturized microdonut resonators . Opt. Express , 2011 . 19 12356 -12364 . DOI:10.1364/OE.19.012356http://doi.org/10.1364/OE.19.012356 .

W. Shi , 等 . Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon . Opt. Express , 2013 . 21 6733 -6738 . DOI:10.1364/OE.21.006733http://doi.org/10.1364/OE.21.006733 .

S. N. Zheng , 等 . A single-chip integrated spectrometer via tunable microring resonator array . IEEE Photonics J. , 2019 . 11 6602809 .

Faix, O. Fourier transform infrared spectroscopy. In Methods in Lignin Chemistry (eds. Lin, S. Y. & Dence, C. W. ) 83–109 (Berlin: Springer, 1992).

A. V. Velasco , 等 . High-resolution Fourier-transform spectrometer chip with microphotonic silicon spiral waveguides . Opt. Lett. , 2013 . 38 706 -708 . DOI:10.1364/OL.38.000706http://doi.org/10.1364/OL.38.000706 .

H. Podmore , 等 . Demonstration of a compressive-sensing Fourier-transform on-chip spectrometer . Opt. Lett. , 2017 . 42 1440 -1443 . DOI:10.1364/OL.42.001440http://doi.org/10.1364/OL.42.001440 .

A. Herrero-Bermello , 等 . On-chip Fourier-transform spectrometers and machine learning: a new route to smart photonic sensors . Opt. Lett. , 2019 . 44 5840 -5843 . DOI:10.1364/OL.44.005840http://doi.org/10.1364/OL.44.005840 .

A. Li , 等 . Fabrication-tolerant Fourier transform spectrometer on silicon with broad bandwidth and high resolution . Photonics Res. , 2020 . 8 219 -224 . DOI:10.1364/PRJ.379184http://doi.org/10.1364/PRJ.379184 .

J. Oliver , W. B. Lee , H. N. Lee . Filters with random transmittance for improving resolution in filter-array-based spectrometers . Opt. Express , 2013 . 21 3969 -3989 . DOI:10.1364/OE.21.003969http://doi.org/10.1364/OE.21.003969 .

Y. Aizu , K. Ogino , T. Asakura . A laser velocimeter using a random pattern . Opt. Commun. , 1987 . 64 205 -210 . DOI:10.1016/0030-4018(87)90376-2http://doi.org/10.1016/0030-4018(87)90376-2 .

J. Ojeda-Castañeda , A. Sauceda . Random gratings as correlator sensors . Opt. Lett. , 1997 . 22 257 -258 . DOI:10.1364/OL.22.000257http://doi.org/10.1364/OL.22.000257 .

D. L. Donoho . Compressed sensing . IEEE Trans. Inf. Theory , 2006 . 52 1289 -1306 . DOI:10.1109/TIT.2006.871582http://doi.org/10.1109/TIT.2006.871582.

J. Oliver , 等 . Improving resolution of miniature spectrometers by exploiting sparse nature of signals . Opt. Express , 2012 . 20 2613 -2625 . DOI:10.1364/OE.20.002613http://doi.org/10.1364/OE.20.002613 .

C. C. Chang , 等 . Spectrum reconstruction for filter-array spectrum sensor from sparse template selection . Optical Eng. , 2011 . 50 114402 DOI:10.1117/1.3645086http://doi.org/10.1117/1.3645086 .

U. Kurokawa , B. I. Choi , C. C. Chang . Filter-based miniature spectrometers: spectrum reconstruction using adaptive regularization . IEEE Sens. J. , 2011 . 11 1556 -1563 . DOI:10.1109/JSEN.2010.2103054http://doi.org/10.1109/JSEN.2010.2103054 .

C. C. Chang , H. N. Lee . On the estimation of target spectrum for filter-array based spectrometers . Opt. Express , 2008 . 16 1056 -1061 . DOI:10.1364/OE.16.001056http://doi.org/10.1364/OE.16.001056 .

Li, A. et al. Ultra-compact single-shot spectrometer enabled by stratified waveguide filters. In Proceedings of the 26th Optoelectronics and Communications Conference (OSA, Hong Kong, China, 2021).

B. Redding , 等 . Evanescently coupled multimode spiral spectrometer . Optica , 2016 . 3 956 -962 . DOI:10.1364/OPTICA.3.000956http://doi.org/10.1364/OPTICA.3.000956 .

H. Y. Zhou , 等 . Compact, submilliwatt, 2 × 2 silicon thermo-optic switch based on photonic crystal nanobeam cavities . Photonics Res. , 2017 . 5 108 -112 . DOI:10.1364/PRJ.5.000108http://doi.org/10.1364/PRJ.5.000108 .

M. Y. Abdelatty , M. M. Badr , M. A. Swillam . Compact silicon electro-optical modulator using hybrid ITO tri-coupled waveguides . J. Lightwave Technol. , 2018 . 36 4198 -4204 . DOI:10.1109/JLT.2018.2863571http://doi.org/10.1109/JLT.2018.2863571 .

W. Bogaerts , 等 . Programmable photonic circuits . Nature , 2020 . 586 207 -216 . DOI:10.1038/s41586-020-2764-0http://doi.org/10.1038/s41586-020-2764-0 .

T. Park , Y. Jeong , K. Yu . Cascaded optical resonator-based programmable photonic integrated circuits . Opt. Express , 2021 . 29 4645 -4660 . DOI:10.1364/OE.415545http://doi.org/10.1364/OE.415545 .

P. J. Winzer , D. T. Neilson . From scaling disparities to integrated parallelism: a decathlon for a decade . J. Lightwave Technol. , 2017 . 35 1099 -1115 . DOI:10.1109/JLT.2017.2662082http://doi.org/10.1109/JLT.2017.2662082 .

W. M. Yao , M. K. Smit , M. J. Wale . Monolithic 300 Gb/s parallel transmitter in InP-based generic photonic integration technology . IEEE J. Sel. Top. Quantum Electron. , 2018 . 24 6100711 DOI:10.1109/JSTQE.2017.2762602http://doi.org/10.1109/JSTQE.2017.2762602 .

Gnauck, A. H. et al. 25.6-Tb/s C+L-band transmission of polarization-multiplexed RZ-DQPSK signals. In Proceedings of National Fiber Optic Engineers Conference (Optical Society of America, Anaheim, 2007).

Y. Hong , 等 . Experimental demonstration of dual O+C-Band WdM transmission over 50-km SSMF with direct detection . J. Lightwave Technol. , 2020 . 38 2278 -2284 . DOI:10.1109/JLT.2020.2964155http://doi.org/10.1109/JLT.2020.2964155 .

A. Wonfor , 等 . Large port count high-speed optical switch fabric for use within datacenters [Invited] . J. Optical Commun. Netw. , 2011 . 3 A32 -A39 . DOI:10.1364/JOCN.3.000A32http://doi.org/10.1364/JOCN.3.000A32 .

Q. X. Cheng , 等 . Recent advances in optical technologies for data centers: a review . Optica , 2018 . 5 1354 -1370 . DOI:10.1364/OPTICA.5.001354http://doi.org/10.1364/OPTICA.5.001354 .

A. Lacaita , 等 . Single-photon detection beyond 1 μm: performance of commercially available germanium photodiodes . Appl. Opt. , 1994 . 33 6902 -6918 . DOI:10.1364/AO.33.006902http://doi.org/10.1364/AO.33.006902 .

J. Michel , J. F. Liu , L. C. Kimerling . High-performance Ge-on-Si photodetectors . Nat. Photonics , 2010 . 4 527 -534 . DOI:10.1038/nphoton.2010.157http://doi.org/10.1038/nphoton.2010.157 .

M. R. Billah , 等 . Hybrid integration of silicon photonics circuits and InP lasers by photonic wire bonding . Optica , 2018 . 5 876 -883 . DOI:10.1364/OPTICA.5.000876http://doi.org/10.1364/OPTICA.5.000876 .

N. Li , 等 . Ultra-low-power sub-photon-voltage high-efficiency light-emitting diodes . Nat. Photonics , 2019 . 13 588 -592 . DOI:10.1038/s41566-019-0463-xhttp://doi.org/10.1038/s41566-019-0463-x .

T. Matsumoto , 等 . Hybrid-integration of SOA on silicon photonics platform based on flip-chip bonding . J. Lightwave Technol. , 2019 . 37 307 -313 . DOI:10.1109/JLT.2018.2870128http://doi.org/10.1109/JLT.2018.2870128 .

X. S. Luo , 等 . Wafer-scale dies-transfer bonding technology for hybrid Ⅲ/Ⅴ-on-silicon photonic integrated circuit application . IEEE J. Sel. Top. Quantum Electron. , 2016 . 22 8200612 DOI:10.1109/JSTQE.2016.2553453http://doi.org/10.1109/JSTQE.2016.2553453 .

J. Yoon , 等 . Heterogeneously integrated optoelectronic devices enabled by micro-transfer printing . Adv. Optical Mater. , 2015 . 3 1313 -1335 . DOI:10.1002/adom.201500365http://doi.org/10.1002/adom.201500365 .

A. Toulouse , 等 . 3D-printed miniature spectrometer for the visible range with a 100 × 100 μm2 footprint . Light.: Adv. Manuf. , 2021 . 2 20 -30 . DOI:10.37188/lam.2021.002http://doi.org/10.37188/lam.2021.002.

W. Hadibrata , 等 . Compact, high-resolution inverse-designed on-chip spectrometer based on tailored disorder modes . Laser Photonics Rev. , 2021 . 15 2000556 DOI:10.1002/lpor.202000556http://doi.org/10.1002/lpor.202000556 .

S. L. Yu , 等 . Optical Free-form couplers for high-density integrated photonics (OFFCHIP): a universal optical interface . J. Lightwave Technol. , 2020 . 38 3358 -3365 . DOI:10.1109/JLT.2020.2971724http://doi.org/10.1109/JLT.2020.2971724 .

O. A. Jimenez Gordillo , 等 . Plug-and-play fiber to waveguide connector . Opt. Express , 2019 . 27 20305 -20310 . DOI:10.1364/OE.27.020305http://doi.org/10.1364/OE.27.020305 .

D. M. Kita , 等 . High-performance and scalable on-chip digital Fourier transform spectroscopy . Nat. Commun. , 2018 . 9 4405 DOI:10.1038/s41467-018-06773-2http://doi.org/10.1038/s41467-018-06773-2 .

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