Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds

Jiao Geng; Wei Yan; Liping Shi; Min Qiu

doi:10.1038/s41377-022-00883-9

Go to Nature Website

Your Location：

Home >

Browse articles >

Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds

Articles

- Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds
- Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds
- Light: Science & Applications 2022年11卷第7期页码：1607-1614
- Affiliations：
  
  1.Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou, 310024, Zhejiang Province, China
  2.Institute of Advanced Technology, Westlake Institute for Advanced Study, 18 Shilongshan Road, Hangzhou, 310024, Zhejiang Province, China
- Author bio：
  
  Liping Shi (shiliping@westlake.edu.cn)
  Min Qiu (qiumin@westlake.edu.cn)
- Funds：
- DOI：10.1038/s41377-022-00883-9
  中图分类号：
Scan for full text
Jiao Geng, Wei Yan, Liping Shi, 等. Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds[J]. Light: Science & Applications, 2022,11(7):1607-1614.

Geng, J. et al. Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds. Light: Science & Applications, 11, 1607-1614 (2022).
Jiao Geng, Wei Yan, Liping Shi, 等. Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds[J]. Light: Science & Applications, 2022,11(7):1607-1614. DOI： 10.1038/s41377-022-00883-9.

Geng, J. et al. Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds. Light: Science & Applications, 11, 1607-1614 (2022). DOI： 10.1038/s41377-022-00883-9.

摘要

Abstract

It is always a great challenge to bridge the nano- and macro-worlds in nanoscience, for instance, manufacturing uniform nanogratings on a whole wafer in seconds instead of hours even days. Here, we demonstrate a single-step while extremely high-throughput femtosecond laser scanning technique to obtain wafer-scale, highly regular nanogratings on semiconductor-on-metal thin films. Our technique takes advantage of long-range surface plasmons-laser interference, which is regulated by a self-initiated seed. By controlling the scanning speed, two types of nanogratings are readily manufactured, which are produced by either oxidation or ablation. We achieve a record manufacturing speed (,>, 1 cm,2, s,−1,), with tunable periodicity of ,Λ,<, 1 µm. The fractional variation of their periodicity is evaluated to be as low as ∆,Λ,/,Λ, ≈ 0.5%. Furthermore, by utilizing the semiconductor-on-metal film-endowed interference effects, an extremely high energy efficiency is achieved via suppressing light reflection during femtosecond laser nano-processing. As the fabricated nanogratings exhibit multi-functionality, we exemplify their practical applications in highly sensitive refractive index sensing, vivid structural colors, and durable superhydrophilicity.

关键词

Keywords

references

H. M. Yu , 等 . Omnidirectional spin-wave nanograting coupler . Nat. Commun. , 2013 . 4 2702 DOI:10.1038/ncomms3702http://doi.org/10.1038/ncomms3702 .

T. W. Ebbesen , 等 . Extraordinary optical transmission through sub-wavelength hole arrays . Nature , 1998 . 391 667 -669 . DOI:10.1038/35570http://doi.org/10.1038/35570 .

S. Lenhert , 等 . Lipid multilayer gratings . Nat. Nanotechnol. , 2010 . 5 275 -279 . DOI:10.1038/nnano.2010.17http://doi.org/10.1038/nnano.2010.17 .

D. Fattal , 等 . Flat dielectric grating reflectors with focusing abilities . Nat. Photonics , 2010 . 4 466 -470 . DOI:10.1038/nphoton.2010.116http://doi.org/10.1038/nphoton.2010.116 .

M. R. Begley , D. S. Gianola , T. R. Ray . Bridging functional nanocomposites to robust macroscale devices . Science , 2019 . 364 eaav4299 DOI:10.1126/science.aav4299http://doi.org/10.1126/science.aav4299 .

Loewen, E. G. & Popov, E. Diffraction Gratings and Applications (CRC Press, 2018).

P. Li , 等 . Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications . Nanoscale , 2021 . 13 1529 -1565 . DOI:10.1039/D0NR07539Fhttp://doi.org/10.1039/D0NR07539F .

Y. Hong , 等 . Solvent-free nanofabrication based on ice-assisted electron-beam lithography . Nano Lett. , 2020 . 20 8841 -8846 . DOI:10.1021/acs.nanolett.0c03809http://doi.org/10.1021/acs.nanolett.0c03809 .

B. H. Cumpston , 等 . Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication . Nature , 1999 . 398 51 -54 . DOI:10.1038/17989http://doi.org/10.1038/17989 .

A. Ródenas , 等 . Three-dimensional femtosecond laser nanolithography of crystals . Nat. Photonics , 2019 . 13 105 -109 . DOI:10.1038/s41566-018-0327-9http://doi.org/10.1038/s41566-018-0327-9 .

N. Lassaline , 等 . Optical Fourier surfaces . Nature , 2020 . 582 506 -510 . DOI:10.1038/s41586-020-2390-xhttp://doi.org/10.1038/s41586-020-2390-x .

T. Ito , S. Okazaki . Pushing the limits of lithography . Nature , 2000 . 406 1027 -1031 . DOI:10.1038/35023233http://doi.org/10.1038/35023233 .

J. Henzie , M. H. Lee , T. W. Odom . Multiscale patterning of plasmonic metamaterials . Nat. Nanotechnol. , 2007 . 2 549 -554 . DOI:10.1038/nnano.2007.252http://doi.org/10.1038/nnano.2007.252 .

B. He , 等 . Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics . Nano Today , 2013 . 8 265 -289 . DOI:10.1016/j.nantod.2013.04.008http://doi.org/10.1016/j.nantod.2013.04.008 .

Y. Zhao , 等 . Optimization and temperature mapping of an ultra-high thermal stability environmental enclosure . Precis. Eng. , 2010 . 34 164 -170 . DOI:10.1016/j.precisioneng.2009.05.006http://doi.org/10.1016/j.precisioneng.2009.05.006 .

J. Bonse , S. Gräf . Maxwell meets Marangoni—a review of theories on laser-induced periodic surface structures . Laser Photonics Rev. , 2020 . 14 2000215 DOI:10.1002/lpor.202000215http://doi.org/10.1002/lpor.202000215 .

I. Gnilitskyi , 等 . High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity . Sci. Rep. , 2017 . 7 8485 DOI:10.1038/s41598-017-08788-zhttp://doi.org/10.1038/s41598-017-08788-z .

L. Wang , 等 . Plasmonic Nano-printing: large-area nanoscale energy deposition for efficient surface texturing . Light.: Sci. Appl. , 2017 . 6 e17112 DOI:10.1038/lsa.2017.112http://doi.org/10.1038/lsa.2017.112 .

J. Geng , 等 . Controllable generation of large-scale highly regular gratings on Si films . Light.: Adv. Manuf. , 2021 . 2 22 .

B. Öktem , 等 . Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses . Nat. Photonics , 2013 . 7 897 -901 . DOI:10.1038/nphoton.2013.272http://doi.org/10.1038/nphoton.2013.272 .

T. T. Zou , 等 . High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse . Light.: Sci. Appl. , 2020 . 9 69 DOI:10.1038/s41377-020-0311-2http://doi.org/10.1038/s41377-020-0311-2 .

M. Huang , 等 . Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser . ACS Nano , 2009 . 3 4062 -4070 . DOI:10.1021/nn900654vhttp://doi.org/10.1021/nn900654v .

A. V. Dostovalov , 等 . Influence of femtosecond laser pulse repetition rate on thermochemical laser-induced periodic surface structures formation by focused astigmatic Gaussian beam . Laser Phys. Lett. , 2019 . 16 026003 DOI:10.1088/1612-202X/aaf78fhttp://doi.org/10.1088/1612-202X/aaf78f .

A. Dostovalov , 等 . Hierarchical anti-reflective laser-induced periodic surface structures (LIPSSs) on amorphous Si films for sensing applications . Nanoscale , 2020 . 12 13431 -13441 . DOI:10.1039/D0NR02182Bhttp://doi.org/10.1039/D0NR02182B .

J. Huang , 等 . Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification . Nanophotonics , 2019 . 8 869 -878 . DOI:10.1515/nanoph-2019-0056http://doi.org/10.1515/nanoph-2019-0056 .

H. B. Xie , 等 . Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling . Nanophotonics , 2021 . 10 3831 -3842 . DOI:10.1515/nanoph-2021-0329http://doi.org/10.1515/nanoph-2021-0329 .

Y. C. Zhang , 等 . Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser . Photonics Res. , 2021 . 9 839 -847 . DOI:10.1364/PRJ.418937http://doi.org/10.1364/PRJ.418937 .

I. Gnilitskyi , 等 . Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses . Appl. Phys. Lett. , 2016 . 109 143101 DOI:10.1063/1.4963784http://doi.org/10.1063/1.4963784 .

H. Wu , 等 . Large area metal micro-/Nano-groove arrays with both structural color and anisotropic wetting fabricated by one-step focused laser interference lithography . Nanoscale , 2019 . 11 4803 -4810 . DOI:10.1039/C8NR09747Jhttp://doi.org/10.1039/C8NR09747J .

Y. P. Deng , 等 . Optical breakdown for silica and silicon with double femtosecond laser pulses . Opt. Express , 2005 . 13 3096 -3103 . DOI:10.1364/OPEX.13.003096http://doi.org/10.1364/OPEX.13.003096 .

Takei, R. in Crystalline and Non-crystalline Solids (ed. Mandracci, P. ) (IntechOpen, 2016).

G. D. Cody , 等 . Disorder and the optical-absorption edge of hydrogenated amorphous silicon . Phys. Rev. Lett. , 1981 . 47 1480 -1483 . DOI:10.1103/PhysRevLett.47.1480http://doi.org/10.1103/PhysRevLett.47.1480 .

M. Lenzner , 等 . Femtosecond optical breakdown in dielectrics . Phys. Rev. Lett. , 1998 . 80 4076 -4079 . DOI:10.1103/PhysRevLett.80.4076http://doi.org/10.1103/PhysRevLett.80.4076 .

H. O. Jeschke , 等 . Laser ablation thresholds of silicon for different pulse durations: Theory and experiment . Appl. Surf. Sci. , 2002 . 197-198 839 -844 . DOI:10.1103/PhysRevLett.80.4076http://doi.org/10.1103/PhysRevLett.80.4076 .

M. Mesch , 等 . Nonlinear plasmonic sensing . Nano Lett. , 2016 . 16 3155 -3159 . DOI:10.1021/acs.nanolett.6b00478http://doi.org/10.1021/acs.nanolett.6b00478 .

J. J. Chen , 等 . Plasmonic sensing and modulation based on Fano resonances . Adv. Optical Mater. , 2018 . 6 1701152 DOI:10.1002/adom.201701152http://doi.org/10.1002/adom.201701152 .

N. Liu , 等 . Infrared perfect absorber and its application as plasmonic sensor . Nano Lett. , 2010 . 10 2342 -2348 . DOI:10.1021/nl9041033http://doi.org/10.1021/nl9041033 .

X. L. Zhu , 等 . Plasmonic colour laser printing . Nat. Nanotechnol. , 2016 . 11 325 -329 . DOI:10.1038/nnano.2015.285http://doi.org/10.1038/nnano.2015.285 .

H. G. Liu , W. X. Lin , M. H. Hong . Surface coloring by laser irradiation of solid substrates . APL Photonics , 2019 . 4 051101 DOI:10.1063/1.5089778http://doi.org/10.1063/1.5089778 .

M. A. Kats , 等 . Nanometre optical coatings based on strong interference effects in highly absorbing media . Nat. Mater. , 2013 . 12 20 -24 . DOI:10.1038/nmat3443http://doi.org/10.1038/nmat3443 .

Z. Y. Lin , M. H. Hong . Femtosecond laser precision engineering: from micron, submicron, to nanoscale . Ultrafast Sci. , 2021 . 2021 9783514 DOI:10.34133/2021/9783514http://doi.org/10.34133/2021/9783514 .

I. Braceras , 等 . TiN-Ag as an antimicrobial and wear resistant coating . Biotribology , 2021 . 28 100192 DOI:10.1016/j.biotri.2021.100192http://doi.org/10.1016/j.biotri.2021.100192 .

M. ElKabbash , 等 . Fano-resonant ultrathin film optical coatings . Nat. Nanotechnol. , 2021 . 16 440 -446 . DOI:10.1038/s41565-020-00841-9http://doi.org/10.1038/s41565-020-00841-9 .

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

Light | 纳米光栅：飞秒激光高通量直写新技术

暂无数据