Integrated optical-readout of a high-Q mechanical out-of-plane mode

Jingkun Guo; Simon Gröblacher

doi:10.1038/s41377-022-00966-7

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Integrated optical-readout of a high-Q mechanical out-of-plane mode

Original Articles

- Integrated optical-readout of a high-Q mechanical out-of-plane mode
- Integrated optical-readout of a high-Q mechanical out-of-plane mode
- LSA 2022年11卷第10期页码：2485-2491
- Affiliations：
  
  Kavli Institute of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628CJ, Delft, The Netherlands
- Author bio：
  
  Simon Gröblacher (s.groeblacher@tudelft.nl)
- Funds：
- DOI：10.1038/s41377-022-00966-7
  中图分类号：
- 纸质出版日期：2022-10-31，
  
  网络出版日期：2022-09-28，
  
  收稿日期：2022-05-12，
  
  修回日期：2022-08-10，
  
  录用日期：2022-08-22
- Accepted：
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Integrated optical-readout of a high-Q mechanical out-of-plane mode[J]. LSA, 2022,11(10):2485-2491.

Guo, J. K. & Gröblacher, S. Integrated optical-readout of a high-Q mechanical out-of-plane mode. Light: Science & Applications, 11, 2485-2491 (2022).
Integrated optical-readout of a high-Q mechanical out-of-plane mode[J]. LSA, 2022,11(10):2485-2491. DOI： 10.1038/s41377-022-00966-7.

Guo, J. K. & Gröblacher, S. Integrated optical-readout of a high-Q mechanical out-of-plane mode. Light: Science & Applications, 11, 2485-2491 (2022). DOI： 10.1038/s41377-022-00966-7.

摘要

Abstract

The rapid development of high-

macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-

structures on a chip

while simultaneously achieving large coupling strengths through an optical read-out. Here

we present a versatile fabrication method

which allows us to build fully integrated optomechanical structures. We place a photonic crystal cavity directly above a mechanical resonator with high-

fundamental out-of-plane mode

separated by a small gap. The highly confined optical field has a large overlap with the mechanical mode

enabling strong optomechanical interaction strengths. Furthermore

we implement a novel photonic crystal design

which allows for a very large cavity photon number

a highly important feature for optomechanical experiments and sensor applications. Our versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device layout. Additionally

it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-

out-of-plane modes alike.

关键词

Keywords

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