Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration

Zhangsheng Xu; Xun Han; Wenqiang Wu; Fangtao Li; Ru Wang; Hui Lu; Qiuchun Lu; Binghui Ge; Ningyan Cheng; Xiaoyi Li; Guangjie Yao; Hao Hong; Kaihui Liu; Caofeng Pan

doi:10.1038/s41377-023-01107-4

Go to Nature Website

Your Location：

Home >

Browse articles >

Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration

Original Articles

- Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration
- Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration
- 光：科学与应用 2023年12卷第4期页码：558-569
- Affiliations：
  
  1.CAS Center for Excellence in Nanoscience, Beijing Key Laboratory of Micro-nano Energy and Sensor, Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 101400, China
  2.School of Nanoscience and Technology, University of Chinese Academy of Sciences, Beijing 100049, China
  3.College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China
  4.College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
  5.Center on Nanoenergy Research, School of Physical Science and Technology, Guangxi University, Nanning 530004, China
  6.Information Materials and Intelligent Sensing Laboratory of Anhui Province, Key Laboratory of Structure and Functional Regulation of Hybrid Materials of Ministry of Education, Institutes of Physical Science and Information Technology, Anhui University, Hefei 230601, China
  7.College of Materials Science and Engineering, Ocean University of China, Qingdao 266100, China
  8.State Key Laboratory for Mesoscopic Physics, Frontiers Science Centre for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
  9.Songshan Lake Materials Laboratory, Dongguan 523808, China
- Author bio：
  
  Xun Han (hanxun@szu.edu.cn)
  Caofeng Pan (cfpan@binn.cas.cn)
- Funds：
- DOI：10.1038/s41377-023-01107-4
  中图分类号：
- 纸质出版日期：2023-4-30，
  
  网络出版日期：2023-3-8，
  
  收稿日期：2022-11-22，
  
  修回日期：2023-2-9，
  
  录用日期：2023-2-15
Scan for full text
Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration[J]. 光：科学与应用, 2023,12(4):558-569.

Xu, Z. S.et al. Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration.Light: Science & Applications,12, 558-569 (2023).
Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration[J]. 光：科学与应用, 2023,12(4):558-569. DOI： 10.1038/s41377-023-01107-4.

Xu, Z. S.et al. Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration.Light: Science & Applications,12, 558-569 (2023). DOI： 10.1038/s41377-023-01107-4.

摘要

Abstract

Metal halide perovskites possess intriguing optoelectronic properties

however

the lack of precise control of on-chip fabrication of the large-scale perovskite single crystal arrays restricts its application in integrated devices. Here

we report a space confinement and antisolvent-assisted crystallization method for the homogeneous perovskite single crystal arrays spanning 100 square centimeter areas. This method enables precise control over the crystal arrays

including different array shapes and resolutions with less than 10%-pixel position variation

tunable pixel dimensions from 2 to 8 μm as well as the in-plane rotation of each pixel. The crystal pixel could serve as a high-quality whispering gallery mode (WGM) microcavity with a quality factor of 2915 and a threshold of 4.14 μJ cm

−2

. Through directly on-chip fabrication on the patterned electrodes

a vertical structured photodetector array is demonstrated with stable photoswitching behavior and the capability to image the input patterns

indicating the potential application in the integrated systems of this method.

关键词

Keywords

references

Quan, L. N. et al. Perovskites for next-generation optical sources.Chem. Rev.119, 7444–7477 (2019).

Han, X. et al. Metal halide perovskite arrays: from construction to optoelectronic applications.Adv. Funct. Mater.31, 2005230 (2021).

Zhu, Y. Z. et al. Inhomogeneous trap-state-mediated ultrafast photocarrier dynamics in CsPbBr3microplates.ACS Appl. Mater. Interfaces13, 6820–6829 (2021).

Yang, Z. et al. Large and ultrastable all-inorganic CsPbBr3monocrystalline films: low-temperature growth and application for high-performance photodetectors.Adv. Mater.30, 1802110 (2018).

Deng, W. et al. A microchannel-confined crystallization strategy enables blade coating of perovskite single crystal arrays for device integration.Adv. Mater.32, 1908340 (2020).

Deng, W. et al. Ultrahigh-responsivity photodetectors from perovskite nanowire arrays for sequentially tunable spectral measurement.Nano Lett.17, 2482–2489 (2017).

He, X. X. et al. Patterning multicolored microdisk laser arrays of cesium lead halide perovskite.Adv. Mater.29, 1604510 (2017).

Feng, J. G. et al. "Liquid knife" to fabricate patterning single-crystalline perovskite microplates toward high-performance laser arrays.Adv. Mater.28, 3732–3741 (2016).

Lee, W. et al. High-resolution spin-on-patterning of perovskite thin films for a multiplexed image sensor array.Adv. Mater.29, 1702902 (2017).

Wu, W. Q. et al. Flexible photodetector arrays based on patterned CH3NH3PbI3-xClxperovskite film for real-time photosensing and imaging.Adv. Mater.31, 1805913 (2019).

Xu, F. Z. et al. Potassium thiocyanate‐assisted enhancement of slot‐die‐coated perovskite films for high‐performance solar cells.Small Sci.1, 2000044 (2021).

Sun, J. L. et al. Piezo-phototronic effect enhanced efficient flexible perovskite solar cells.ACS Nano13, 4507–4513 (2019).

Min, H. et al. Perovskite solar cells with atomically coherent interlayers on SnO2electrodes.Nature598, 444–450 (2021).

Gu, L. L. et al. 3D arrays of 1024-pixel image sensors based on lead halide perovskite nanowires.Adv. Mater.28, 9713–9721 (2016).

Wu, W. Q. et al. Ultrathin and conformable lead halide perovskite photodetector arrays for potential application in retina-like vision sensing.Adv. Mater.33, 2006006 (2021).

Yang, Z. et al. A high performance CsPbBr3microwire based photodetector boosted by coupling plasmonic and piezo-phototronic effects.Nano Energy85, 105951 (2021).

Gao, H. F. et al. Bandgap engineering of single-crystalline perovskite arrays for high-performance photodetectors.Adv. Funct. Mater.28, 1804349 (2018).

Leung, S. F. et al. A self-powered and flexible organometallic halide perovskite photodetector with very high detectivity.Adv. Mater.30, 1704611 (2018).

Liu, Y. C. et al. A 1300 mm2ultrahigh-performance digital imaging assembly using high-quality perovskite single crystals.Adv. Mater.30, 1707314 (2018).

Lin, K. B. et al. Perovskite light-emitting diodes with external quantum efficiency exceeding 20 percent.Nature562, 245–248 (2018).

Cao, Y. et al. Perovskite light-emitting diodes based on spontaneously formed submicrometre-scale structures.Nature562, 249–253 (2018).

Lei, Y. S. et al. Controlled homoepitaxial growth of hybrid perovskites.Adv. Mater.30, 1705992 (2018).

Qian, X. Y. et al. Strategies to improve luminescence efficiency and stability of blue perovskite light‐emitting devices.Small Sci.1, 2000048 (2021).

Li, S. J. et al. Realizing CsPbBr3light-emitting diode arrays based on pdms template confined solution growth of single-crystalline perovskite.J. Phys. Chem. Lett.11, 8275–8282 (2020).

Gu, Z. K. et al. Controllable growth of high-quality inorganic perovskite microplate arrays for functional optoelectronics.Adv. Mater.32, 1908006 (2020).

Yang, Z. et al. Controllable growth of aligned monocrystalline CsPbBr3microwire arrays for piezoelectric-induced dynamic modulation of single-mode lasing.Adv. Mater.31, 1900647 (2019).

Wang, K. et al. Wettability-guided screen printing of perovskite microlaser arrays for current-driven displays.Adv. Mater.32, 2001999 (2020).

Jeong, B., Gkoupidenis, P. & Asadi, K. Solution-processed perovskite field-effect transistor artificial synapses.Adv. Mater.33, 2104034 (2021).

Yu, W. L. et al. Single crystal hybrid perovskite field-effect transistors.Nat. Commun.9, 5354 (2018).

Liu, A. et al. High-performance inorganic metal halide perovskite transistors.Nat. Electron.5, 78–83 (2022).

Liao, H. C. et al. Enhanced efficiency of hot-cast large-area planar perovskite solar cells/modules having controlled chloride incorporation.Adv. Energy Mater.7, 1601660 (2017).

Hwang, K. et al. Toward large scale roll-to-roll production of fully printed perovskite solar cells.Adv. Mater.27, 1241–1247 (2015).

Kim, D. H. et al. Outlook and challenges of perovskite solar cells toward terawatt-scale photovoltaic module technology.Joule2, 1437–1451 (2018).

Liu, P., Tang, G. Q. & Yan, F. Strategies for large-scale fabrication of perovskite films for solar cells.Sol. RRL6, 2100683 (2022).

Park, N. G. & Zhu, K. Scalable fabrication and coating methods for perovskite solar cells and solar modules.Nat. Rev. Mater.5, 333–350 (2020).

Trivedi, S. et al. Recent progress in growth of single-crystal perovskites for photovoltaic applications.ACS Omega6, 1030–1042 (2021).

Li, J. Y. et al. Perovskite single crystals: synthesis, optoelectronic properties, and application.Adv. Funct. Mater.31, 2008684 (2021).

Liu, Y. C., Yang, Z. & Liu, S. Z. Recent progress in single-crystalline perovskite research including crystal preparation, property evaluation, and applications.Adv. Mater.5, 1700471 (2018).

Lei, Y. S., Chen, Y. M. & Xu, S. Single-crystal halide perovskites: opportunities and challenges.Matter4, 2266–2308 (2021).

Lin, C. K. et al. Two-step patterning of scalable all-inorganic halide perovskite arrays.ACS Nano14, 3500–3508 (2020).

Wang, G. M. et al. Wafer-scale growth of large arrays of perovskite microplate crystals for functional electronics and optoelectronics.Sci. Adv.1, e1500613 (2015).

Chen, G. S. et al. Stable α-CsPbI3perovskite nanowire arrays with preferential crystallographic orientation for highly sensitive photodetectors.Adv. Funct. Mater.29, 1801741 (2019).

Du, J. S. et al. Halide perovskite nanocrystal arrays: multiplexed synthesis and size-dependent emission.Sci. Adv.6, eabc4959 (2020).

Chen, J. et al. Single-crystal thin films of cesium lead bromide perovskite epitaxially grown on metal oxide perovskite (SrTiO3).J. Am. Chem. Soc.139, 13525–13532 (2017).

Zhang, W. et al. Controlling the cavity structures of two-photon-pumped perovskite microlasers.Adv. Mater.28, 4040–4046 (2016).

Lai, Z. X. et al. High-performance flexible self-powered photodetectors utilizing spontaneous electron and hole separation in quasi-2D halide perovskites.Small17, 2100442 (2021).

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

暂无数据