Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution

Zhihao Liu; Guangwei Hu; Huapeng Ye; Miaoyang Wei; Zhenghao Guo; Kexu Chen; Chen Liu; Biao Tang; Guofu Zhou

doi:10.1038/s41377-023-01174-7

Go to Nature Website

Your Location：

Home >

Browse articles >

Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution

Original Articles

- Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution
- Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution
- LSA 2023年12卷第7期页码：1318-1326
- Affiliations：
  
  1.Guangdong Provincial Key Laboratory of Optical Information Materials and Technology & Institute of Electronic Paper Displays, South China Academy of Advanced Optoelectronics, South China Normal University, Guangzhou 510006, China
  2.National Center for International Research on Green Optoelectronics, South China Normal University, Guangzhou 510006, China
  3.School of Electrical and Electronic Engineering, 50 Nanyang Avenue, Nanyang Technological University, Singapore 639798, Singapore
  4.Shenzhen Guohua Optoelectronics Tech. Co. Ltd, Shenzhen 518110, China
- Author bio：
  
  Huapeng Ye (yehp@m.scnu.edu.cn)
  Biao Tang (tangbiao@scnu.edu.cn)
  Guofu Zhou (guofu.zhou@m.scnu.edu.cn)
- Funds：
- DOI：10.1038/s41377-023-01174-7
  中图分类号：
- 纸质出版日期：2023-07-31，
  
  网络出版日期：2023-06-07，
  
  收稿日期：2023-01-02，
  
  修回日期：2023-04-11，
  
  录用日期：2023-04-26
- Accepted：
Scan QR Code
Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution[J]. LSA, 2023,12(7):1318-1326.

Liu, Z. H. et al. Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution. Light: Science & Applications, 12, 1318-1326 (2023).
Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution[J]. LSA, 2023,12(7):1318-1326. DOI： 10.1038/s41377-023-01174-7.

Liu, Z. H. et al. Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution. Light: Science & Applications, 12, 1318-1326 (2023). DOI： 10.1038/s41377-023-01174-7.

摘要

Abstract

Microlens arrays (MLAs) based on the selective wetting have opened new avenues for developing compact and miniaturized imaging and display techniques with ultrahigh resolution beyond the traditional bulky and volumetric optics. However

the selective wetting lenses explored so far have been constrained by the lack of precisely defined pattern for highly controllable wettability contrast

thus limiting the available droplet curvature and numerical aperture

which is a major challenge towards the practical high-performance MLAs. Here we report a mold-free and self-assembly approach of mass-production of scalable MLAs

which can also have ultrasmooth surface

ultrahigh resolution

and the large tuning range of the curvatures. The selective surface modification based on tunable oxygen plasma can facilitate the precise pattern with adjusted chemical contrast

thus creating large-scale microdroplets array with controlled curvature. The numerical aperture of the MLAs can be up to 0.26 and precisely tuned by adjusting the modification intensity or the droplet dose. The fabricated MLAs have high-quality surface with subnanometer roughness and allow for record-high resolution imaging up to equivalently 10

328 ppi

as we demonstrated. This study shows a cost-effective roadmap for mass-production of high-performance MLAs

which may find applications in the rapid proliferating integral imaging industry and high-resolution display.

关键词

Keywords

references

Wu, J. M. et al. An integrated imaging sensor for aberration-corrected 3D photography.Nature612, 62–71 (2022)..

Royo, S.&Ballesta-Garcia, M. An overview of Lidar imaging systems for autonomous vehicles.Appl. Sci.9, 4093 (2019)..

Schambach, M.&León, F. P. Microlens array grid estimation, light field decoding, and calibration.IEEE Trans. Comput. Imaging6, 591–603 (2020)..

Lin, R. J. et al. Achromatic metalens array for full-colour light-field imaging.Nat. Nanotechnol.14, 227–231 (2019)..

Yu, C. B. et al. Microlens array snapshot hyperspectral microscopy system for the biomedical domain.Appl. Opt.60, 1896–1902 (2021)..

Zhu, X. F. et al. Supercritical lens array in a centimeter scale patterned with maskless UV lithography.Opt. Lett.45, 1798–1801 (2020)..

Martínez-Corral, M.&Javidi, B. Fundamentals of 3D imaging and displays: a tutorial on integral imaging, light-field, and plenoptic systems.Adv. Opt. Photonics10, 512–566 (2018)..

Fan, Z. B. et al. A broadband achromatic metalens array for integral imaging in the visible.Light Sci. Appl.8, 67 (2019)..

Park, J. H. et al. Three-dimensional display scheme based on integral imaging with three-dimensional information processing.Opt. Express12, 6020–6032 (2004)..

Hirayama, R. et al. A volumetric display for visual, tactile and audio presentation using acoustic trapping.Nature575, 320–323 (2019)..

Liang, W. L., Pan, J. G.&Su, G. D. J. One-lens camera using a biologically based artificial compound eye with multiple focal lengths.Optica6, 326–334 (2019)..

Douglass, K. M. et al. Super-resolution imaging of multiple cells by optimized flat-field epi-illumination.Nat. Photonics10, 705–708 (2016)..

Kuang, M. X., Wang, L. B.&Song, Y. L. Controllable printing droplets for high-resolution patterns.Adv. Mater.26, 6950–6958 (2014)..

Jeong, K. H., Kim, J.&Lee, L. P. Biologically inspired artificial compound eyes.Science312, 557–561 (2006)..

Gissibl, T. et al. Two-photon direct laser writing of ultracompact multi-lens objectives.Nat. Photonics10, 554–560 (2016)..

Zhou, X. T. et al. Fabrication of large-scale microlens arrays based on screen printing for integral imaging 3D display.ACS Appl. Mater. Interfaces8, 24248–24255 (2016)..

Bae, S. I. et al. Multifocal microlens arrays using multilayer photolithography.Opt. Express28, 9082–9088 (2020)..

Jiang, J. K. et al. Continuous high-throughput fabrication of architected micromaterials via in-Air photopolymerization.Adv. Mater.33, 2006336 (2021)..

Yang, S. P. et al. Rotational offset microlens arrays for highly efficient structured pattern projection.Adv. Opt. Mater.8, 2000395 (2020)..

He, Z. Q. et al. Switchable pancharatnam-berry microlens array with nano-imprinted liquid crystal alignment.Opt. Lett.43, 5062–5065 (2018)..

Zuo, H. J. et al. CMOS compatible fabrication of micro, nano convex silicon lens arrays by conformal chemical vapor deposition.Opt. Express25, 3069–3076 (2017)..

Yang, Q. et al. Bioinspired artificial compound eyes: characteristic, fabrication, and application.Adv. Mater. Technol.6, 2100091 (2021)..

Li, L. H. et al. Carbide-bonded graphene-based Joule heating for embossing fine microstructures on optical glass.Appl. Surf. Sci.500, 144004 (2020)..

Zhang, L. et al. Microfabrication of a diffractive microlens array on n-GaAs by an efficient electrochemical method.Adv. Mater.19, 3912–3918 (2007)..

Yan, J. W. et al. Fabricating micro-structured surface by using single-crystalline diamond endmill.Int. J. Adv. Manuf. Technol.51, 957–964 (2010)..

Lachaux, J. et al. Soft thermoplastic elastomer for easy and rapid spin-coating fabrication of microfluidic devices with high hydrophilization and bonding performances.Adv. Mater. Technol.4, 1800308 (2019)..

Xu, M. et al. Self-assembled microlens array with controllable focal length formed on a selective wetting surface.ACS Appl. Mater. Interfaces12, 7826–7832 (2020)..

Elgarisi, M. et al. Fabrication of freeform optical components by fluidic shaping.Optica8, 1501–1506 (2021)..

Feng, W. Q. et al. Single-step fabrication of high-density microdroplet arrays of low-surface-tension liquids.Adv. Mater.28, 3202–3208 (2016)..

Kim, J. Y. et al. Directly fabricated multi-scale microlens arrays on a hydrophobic flat surface by a simple ink-jet printing technique.J. Mater. Chem.22, 3053–3058 (2012)..

Kinloch, A. J. The science of adhesion.J. Mater. Sci.15, 2141–2166 (1980)..

Li, X. M. et al. Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes.Adv. Mater.24, OP165–OP169 (2012)..

Lai, L. J., Zhou, H.&Zhu, L. M. Fabrication of microlens array on silicon surface using electrochemical wet stamping technique.Appl. Surf. Sci.364, 442–445 (2016)..

Zhang, P. et al. A novel objective method for assessing high‐contrast spatial resolution in CT based on the Rayleigh criterion.Med. Phys.44, 460–469 (2017)..

Akatay, A.&Urey, H. Design and optimization of microlens array based high resolution beam steering system.Opt. Express15, 4523–4529 (2007)..

Jiang, H. et al. Microlens arrays above interlaced plasmonic pixels for optical security devices with high‐resolution multicolor motion effects.Adv. Opt. Mater.7, 1900237 (2019)..

Arbabi, A. et al. Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays.Nat. Commun.6, 7069 (2015)..

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

Light | 具有超光滑表面和高分辨率的自组装微透镜阵列

暂无数据