1.School of Electrical, Computer and Energy Engineering, Arizona State University, 85281 Tempe, AZ, USA
2.Center for Photonic Innovation, Arizona State University, 85281 Tempe, AZ, USA
3.Biodesign Center for Molecular Design and Biomimetics, Arizona State University, 85281 Tempe, AZ, USA
Yu Yao (yuyao@asu.edu)
纸质出版日期:2023-10-31,
网络出版日期:2023-09-06,
收稿日期:2023-04-29,
修回日期:2023-07-27,
录用日期:2023-08-09
Scan QR Code
Chip-integrated metasurface full-Stokes polarimetric imaging sensor[J]. LSA, 2023,12(10):2131-2144.
Zuo, J. W. et al. Chip-integrated metasurface full-Stokes polarimetric imaging sensor. Light: Science & Applications, 12, 2131-2144 (2023).
Chip-integrated metasurface full-Stokes polarimetric imaging sensor[J]. LSA, 2023,12(10):2131-2144. DOI: 10.1038/s41377-023-01260-w.
Zuo, J. W. et al. Chip-integrated metasurface full-Stokes polarimetric imaging sensor. Light: Science & Applications, 12, 2131-2144 (2023). DOI: 10.1038/s41377-023-01260-w.
Polarimetric imaging has a wide range of applications for uncovering features invisible to human eyes and conventional imaging sensors. Chip-integrated
fast
cost-effective
and accurate full-Stokes polarimetric imaging sensors are highly desirable in many applications
which
however
remain elusive due to fundamental material limitations. Here we present a chip-integrated
Meta
surface-based Full-Stokes
Polar
imetric
Im
aging sensor (MetaPolarIm) realized by integrating an ultrathin (~600 nm) metasurface polarization filter array (MPFA) onto a visible imaging sensor with CMOS compatible fabrication processes. The MPFA is featured with broadband dielectric-metal hybrid chiral metasurfaces and double-layer nanograting polarizers. This chip-integrated polarimetric imaging sensor enables single-shot full-Stokes imaging (speed limited by the CMOS imager) with the most compact form factor
records high measurement accuracy
dual-color operation (green and red) and a field of view up to 40 degrees. MetaPolarIm holds great promise to enable transformative applications in autonomous vision
industry inspection
space exploration
medical imaging and diagnosis.
Tyo, J. S. et al. Target detection in optically scattering media by polarization-difference imaging.Appl. Opt.35, 1855–1870 (1996)..
Garren, D. A. et al. Full-polarization matched-illumination for target detection and identification.IEEE Trans. Aerosp. Electron. Syst.38, 824–837 (2002)..
Lu, H. M. et al. Underwater optical image processing: a comprehensive review.Mob. Netw. Appl.22, 1204–1211 (2017)..
Demos, S. G., Radousky, H. B.&Alfano, R. R. Deep subsurface imaging in tissues using spectral and polarization filtering.Opt. Express7, 23–28 (2000)..
Jacques, S. L., Roman, J. R.&Lee, K. Imaging superficial tissues with polarized light.Lasers Surg. Med.26, 119–129 (2000)..
He, C. et al. Polarisation optics for biomedical and clinical applications: a review.Light Sci. Appl.10, 194 (2021)..
Tyo, J. S. et al. Review of passive imaging polarimetry for remote sensing applications.Appl. Opt.45, 5453–5469 (2006)..
Duan, J. et al. Review of polarization imaging for international military application.Proceedings of SPIE 8908, International Symposium on Photoelectronic Detection and Imaging 2013: Imaging Sensors and Applications. Beijing, China: SPIE, 2013.
Kuhn, J. R., Potter, D.&Parise, B. Imaging polarimetric observations of a new circumstellar disk system.Astrophys. J.553, L189 (2001)..
Pezzaniti, J. L.&Chenault, D. B. A division of aperture MWIR imaging polarimeter.Proceedings of SPIE 5888, Polarization Science and Remote Sensing II. San Diego, California, United States: SPIE, 2005.
Tu, X. Z. et al. Division of amplitude RGB full-Stokes camera using micro-polarizer arrays.Opt. Express25, 33160–33175 (2017)..
Vedel, M., Breugnot, S.&Lechocinski, N. Full Stokes polarization imaging camera.Proceedings of SPIE 8160, Polarization Science and Remote Sensing V. San Diego, California, United States: SPIE, 2011.
Gruev, V., Perkins, R.&York, T. CCD polarization imaging sensor with aluminum nanowire optical filters.Opt. Express18, 19087–19094 (2010)..
Wang, J. J. et al. 30-nm-wide aluminum nanowire grid for ultrahigh contrast and transmittance polarizers made by UV-nanoimprint lithography.Appl. Phys. Lett.89, 141105 (2006)..
Wang, J. J. et al. High-performance, large area, deep ultraviolet to infrared polarizers based on 40 nm line/78 nm space nanowire grids.Appl. Phys. Lett.90, 061104 (2007)..
Sony. Sony polarsens 2022. athttps://www.sony-semicon.com/en/technology/industry/polarsens.htmlhttps://www.sony-semicon.com/en/technology/industry/polarsens.html. (Please check if the website matches the literature).
Myhre, G. et al. Liquid crystal polymer full-stokes division of focal plane polarimeter.Opt. Express20, 27393–27409 (2012)..
Hsu, W. L. et al. Polarization microscope using a near infrared full-Stokes imaging polarimeter.Opt. Express23, 4357–4368 (2015)..
Zhao, X. J. et al. Liquid-crystal micropolarimeter array for full Stokes polarization imaging in visible spectrum.Opt. Express18, 17776–17787 (2010)..
Gruev, V., Van der Spiegel, J.&Engheta, N. Dual-tier thin film polymer polarization imaging sensor.Opt. Express18, 19292–19303 (2010)..
Altaqui, A. et al. Mantis shrimp–inspired organic photodetector for simultaneous hyperspectral and polarimetric imaging.Sci. Adv.7, eabe3196 (2021)..
Tu, X. Z. et al. Division of focal plane red–green–blue full-Stokes imaging polarimeter.Appl. Opt.59, G33–G40 (2020)..
Intaravanne, Y.&Chen, X. Z. Recent advances in optical metasurfaces for polarization detection and engineered polarization profiles.Nanophotonics9, 1003–1014 (2020)..
Rubin, N. A. et al. Matrix Fourier optics enables a compact full-Stokes polarization camera.Science365, eaax1839 (2019)..
Ren, Y. Z. et al. Full-stokes polarimetry for visible light enabled by an all-dielectric metasurface.Adv. Photonics Res.3, 2100373 (2022)..
Arbabi, E. et al. Full-Stokes imaging polarimetry using dielectric metasurfaces.ACS Photonics5, 3132–3140 (2018)..
Yang, Z. Y. et al. Generalized Hartmann-Shack array of dielectric metalens sub-arrays for polarimetric beam profiling.Nat. Commun.9, 4607 (2018)..
Bai, J., Zuo, J. W.&Yao, Y. Mid-infrared chip-integrated full-stokes polarimeter array based on plasmonic metasurfaces.Proceedings of 2022 Conference on Lasers and Electro-Optics. San Jose, CA, USA: IEEE, 2022.
Shah, Y. D. et al. An all-dielectric metasurface polarimeter.ACS Photonics9, 3245–3252 (2022)..
Li, L. F. et al. Monolithic full-stokes near-infrared polarimetry with chiral plasmonic metasurface integrated graphene–silicon photodetector.ACS Nano14, 16634–16642 (2020)..
Jung, M. et al. Polarimetry using graphene-integrated anisotropic metasurfaces.ACS Photonics5, 4283–4288 (2018)..
Bai, J. et al. Chip-integrated plasmonic flat optics for mid-infrared full-Stokes polarization detection.Photonics Res.7, 1051–1060 (2019)..
Bai, J.&Yao, Y. Highly efficient anisotropic chiral plasmonic metamaterials for polarization conversion and detection.ACS Nano15, 14263–14274 (2021)..
Lee, K. et al. Ultracompact broadband plasmonic polarimeter.Laser Photonics Rev.12, 1700297 (2018)..
Afshinmanesh, F. et al. Measurement of the polarization state of light using an integrated plasmonic polarimeter.Nanophotonics1, 125–129 (2012)..
Basiri, A. et al. Nature-inspired chiral metasurfaces for circular polarization detection and full-Stokes polarimetric measurements.Light Sci. Appl.8, 78 (2019)..
Chael, A. A. et al. High-resolution linear polarimetric imaging for the Event Horizon Telescope.Astrophys. J.829, 11 (2016)..
Sun, D. M., Huang, X.&Yang, K. L. A multimodal vision sensor for autonomous driving.Proceedings of SPIE 11166, Counterterrorism, Crime Fighting, Forensics, and Surveillance Technologies III. Strasbourg, France: SPIE, 2019.
Yan, L. et al. New areas in polarization 2: remote sensing for advanced space exploration and global change research. inPolarization Remote Sensing Physics(eds Yan, L. et al.) (Singapore: Springer, 2020), 311–337.
Andreou, A. G.&Kalayjian, Z. K. Polarization imaging: principles and integrated polarimeters.IEEE Sens. J.2, 566–576 (2002)..
Meriaudeau, F. et al. Polarization imaging for industrial inspection.Proceedings of SPIE 6813, Image Processing: Machine Vision Applications. San Jose, California, United States: SPIE, 2008.
Fan, S. H.&Joannopoulos, J. D. Analysis of guided resonances in photonic crystal slabs.Phys. Rev. B65, 235112 (2002)..
Wang,S. et al. Guided-mode resonances in planar dielectric-layer diffraction gratings.J. Optical Soc. Am. A7, 1470–1474 (1990)..
Wang, S. S.&Magnusson, R. Theory and applications of guided-mode resonance filters.Appl. Opt.32, 2606–2613 (1993)..
Wang, C. et al. Wafer-scale integration of sacrificial nanofluidic chips for detecting and manipulating single DNA molecules.Nat. Commun.8, 14243 (2017)..
Berry, H. G., Gabrielse, G.&Livingston, A. E. Measurement of the Stokes parameters of light.Appl. Opt.16, 3200–3205 (1977)..
Ren, H. N. et al. Sensor modeling and calibration method based on extinction ratio error for camera-based polarization navigation sensor.Sensors20, 3779 (2020)..
Azzam, R. M. A. Instrument matrix of the four-detector photopolarimeter: physical meaning of its rows and columns and constraints on its elements.J. Optical Soc. Am. A7, 87–91 (1990)..
Xiong, J. H.&Wu, S. T. Planar liquid crystal polarization optics for augmented reality and virtual reality: from fundamentals to applications.eLight1, 3 (2021)..
0
浏览量
0
Downloads
0
CSCD
关联资源
相关文章
相关作者
相关机构
京公网安备11010802024621