High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy

Mindaugas Juodėnas; Erik Strandberg; Alexander Grabowski; Johan Gustavsson; Hana Šípová-Jungová; Anders Larsson; Mikael Käll

doi:10.1038/s41377-023-01286-0

Go to Nature Website

Your Location：

Home >

Browse articles >

High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy

Original Articles

- High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy
- High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy
- LSA 2023年12卷第11期页码：2434-2442
- Affiliations：
  
  1.Department of Physics, Chalmers University of Technology, 412 96 Gothenburg, Sweden
  2.Department of Microtechnology and Nanoscience, Chalmers University of Technology, 412 96 Gothenburg, Sweden
- Author bio：
  
  Mindaugas Juodėnas (mindaugas.juodenas@chalmers.se)
  Mikael Käll (mikael.kall@chalmers.se)
- Funds：
- DOI：10.1038/s41377-023-01286-0
  中图分类号：
- 纸质出版日期：2023-11-30，
  
  网络出版日期：2023-10-13，
  
  收稿日期：2023-05-26，
  
  修回日期：2023-09-14，
  
  录用日期：2023-09-14
- Accepted：
Scan QR Code
High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy[J]. LSA, 2023,12(11):2434-2442.

Juodėnas, M. et al. High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy. Light: Science & Applications, 12, 2434-2442 (2023).
High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy[J]. LSA, 2023,12(11):2434-2442. DOI： 10.1038/s41377-023-01286-0.

Juodėnas, M. et al. High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy. Light: Science & Applications, 12, 2434-2442 (2023). DOI： 10.1038/s41377-023-01286-0.

摘要

Abstract

Flat metaoptics components are looking to replace classical optics elements and could lead to extremely compact biophotonics devices if integrated with on-chip light sources and detectors. However

using metasurfaces to shape light into wide angular range wavefronts with high efficiency

as is typically required in high-contrast microscopy applications

remains a challenge. Here we demonstrate curved GaAs metagratings integrated on vertical-cavity surface-emitting lasers (VCSELs) that enable on-chip illumination in total internal reflection and dark field microscopy. Based on an unconventional design that circumvents the aspect ratio dependent etching problems in monolithic integration

we demonstrate off-axis emission centred at 60° in air and 63° in glass with > 90% and > 70% relative deflection efficiency

respectively. The resulting laser beam is collimated out-of-plane but maintains Gaussian divergence in-plane

resulting in a long and narrow illumination area. We show that metagrating-integrated VCSELs of different kinds can be combined to enable rapid switching between dark-field and total internal reflection illumination. Our approach provides a versatile illumination solution for high-contrast imaging that is compatible with conventional microscopy setups and can be integrated with biophotonics devices

such as portable microscopy

NIR-II range bioimaging

and lab-on-a-chip devices.

关键词

Keywords

references

Yu, N. et al. Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction.Science334, 333–337 (2011)..

Bomzon, Z. et al. E. Space-variant Pancharatnam–Berry phase optical elements with computer-generated subwavelength gratings.Opt. Lett.27, 1141–1143 (2002)..

Martins, R. J. et al. Metasurface-enhanced light detection and ranging technology.Nat. Commun.13, 5724 (2022)..

Rubin, N. A. et al. Matrix Fourier optics enables a compact full-Stokes polarization camera.Science365, eaax1839 (2019)..

Zheng, Y. Q. et al. Enriching Metasurface Functionalities by Fully Employing the Inter-Meta-Atom Degrees of Freedom for Double-Key-Secured Encryption.Adv. Mater. Technol.8, 2201468 (2023)..

Li, X. Y. et al. Experimental demonstration of optical trapping and manipulation with multifunctional metasurface.Opt. Lett.47, 977–980 (2022)..

Tseng, M. L. et al. Vacuum ultraviolet nonlinear metalens.Sci. Adv.8, eabn5644 (2022)..

Khaidarov, E. et al. Control of LED Emission with Functional Dielectric Metasurfaces.Laser Photon. Rev.14, 1900235 (2020)..

Joo, W. J. et al. Metasurface-driven OLED displays beyond 10, 000 pixels per inch.Science370, 459–463 (2020)..

Wen, D. D.&Crozier, K. B. Semiconductor lasers with integrated metasurfaces for direct output beam modulation, enabled by innovative fabrication methods.Nanophotonics12, 1443–1457, https://doi.org/10.1515/nanoph-2022-0585 (2023)..

Filipe, V., Hawe, A.&Jiskoot, W. Critical Evaluation of Nanoparticle Tracking Analysis (NTA) by NanoSight for the Measurement of Nanoparticles and Protein Aggregates.Pharm. Res.27, 796–810 (2010)..

Rupert, D. L. M. et al. Effective Refractive Index and Lipid Content of Extracellular Vesicles Revealed Using Optical Waveguide Scattering and Fluorescence Microscopy.Langmuir34, 8522–8531 (2018)..

Taylor, R. W.&Sandoghdar, V. Interferometric Scattering Microscopy: Seeing Single Nanoparticles and Molecules via Rayleigh Scattering.Nano Lett.19, 4827–4835 (2019)..

Kashkanova, A. D. et al. Precision size and refractive index analysis of weakly scattering nanoparticles in polydispersions.Nat. Methods19, 586–593 (2022)..

Špačková, B. et al. Label-free nanofluidic scattering microscopy of size and mass of single diffusing molecules and nanoparticles.Nat. Methods19, 751–758 (2022)..

Tayal, S. et al. Design and development of integrated TIRF and common-path quantitative phase microscopic health care system with high stability.Opt. Lasers Eng.155, 107057 (2022)..

Tripathy, S. P. et al. Femtomolar detection of SARS-CoV-2 via peptide beacons integrated on a miniaturized TIRF microscope.Sci. Adv.8, eabn2378 (2022)..

Ramachandran, S. et al. High performance, LED powered, waveguide based total internal reflection microscopy.Sci. Rep.3, 2133 (2013)..

Gortari, A. N. et al. Metasurface-based total internal reflection microscopy.Biomed. Opt. Express11, 1967–1976 (2020)..

Shitrit, N. et al. Ultracompact Structured Light System of Vertical-Cavity Surface-Emitting Lasers Combining Metagratings.2020 Conference on Lasers and Electro-Optics(CLEO). 1–2 (San Jose: IEEE, 2020).

Sun, Y. Q. et al. Direct Generation of Orbital Angular Momentum Beams by Integrating All-Dielectric Metasurface to Vertical-Cavity Surface-Emitting Laser.2017 Asia Communications and Photonics Conference (ACP). 1–3 (Guangzhou: IEEE, 2017).

Wen, D. D. et al. VCSELs with On-Facet Metasurfaces for Polarization State Generation and Detection.Adv. Opt. Mater.9, 2001780 (2021)..

Seghilani, M. S. et al. Vortex Laser based on III-V semiconductor metasurface: direct generation of coherent Laguerre-Gauss modes carrying controlled orbital angular momentum.Sci. Rep.6, 38156 (2016)..

Jia, X. L. et al. Circularly-Polarized Emission from Electrically-Pumped VCSELs with Chiral-Metasurface Reflectors. 2022 28th International Semiconductor Laser Conference (ISLC). Matsue: IEEE, 2022, 1–2,https://doi.org/10.23919/ISLC52947.2022.9943380https://doi.org/10.23919/ISLC52947.2022.9943380(2022).

Xie, Y. Y. et al. Metasurface-integrated vertical cavity surface-emitting lasers for programmable directional lasing emissions.Nat. Nanotechnol.15, 125–130 (2020)..

Ni, P. N. et al. Spin-decoupling of vertical cavity surface-emitting lasers with complete phase modulation using on-chip integrated Jones matrix metasurfaces.Nat. Commun.13, 7795 (2022)..

Wang, Q. H. et al. On-Chip Generation of Structured Light Based on Metasurface Optoelectronic Integration.Laser Photon. Rev.15, 2000385 (2021)..

Byrnes, S. J. et al. Designing large, high-efficiency, high-numerical-aperture, transmissive meta-lenses for visible light.Opt. Express24, 5110–5124 (2016)..

Paniagua-Domínguez, R. et al. A Metalens with a Near-Unity Numerical Aperture.Nano Lett.18, 2124–2132 (2018)..

Haidner, H. et al. Design of a blazed grating consisting of metallic subwavelength binary grooves.Opt. Commun.98, 5–10 (1993)..

Haidner, H., Sheridan, J. T.&Streibl, N. Dielectric binary blazed gratings.Appl. Opt.32, 4276–4278 (1993)..

Collischon, M. et al. Binary blazed reflection gratings.Appl. Opt.33, 3572–3577 (1994)..

Lalanne, P. et al. Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings.Opt. Lett.23, 1081–1083 (1998)..

Lalanne, P. Waveguiding in blazed-binary diffractive elements.J. Opt. Soc. Am. A16, 2517–2520 (1999)..

Li, K. et al. Monolithic high-contrast metastructure for beam-shaping VCSELs.Optica5, 10–13 (2018)..

Zhong, Q. H. et al. Focusing-curved subwavelength grating couplers for ultra-broadband silicon photonics optical interfaces.Opt. Express22, 18224–18231 (2014)..

Zeitner, U. D. et al. High performance diffraction gratings made by e-beam lithography.Appl. Phys. A109, 789–796 (2012)..

Paiè, P. et al. Microfluidic Based Optical Microscopes on Chip.Cytom. Part A93, 987–996 (2018)..

Oliinyk, O. S. et al. Deep-tissue SWIR imaging using rationally designed small red-shifted near-infrared fluorescent protein.Nat. Methods20, 70–74 (2023)..

Miao, Y. W. et al. Recent Progress in Fluorescence Imaging of the Near-Infrared II Window.ChemBioChem19, 2522–2541 (2018)..

Carr, J. A. et al. Shortwave infrared fluorescence imaging with the clinically approved near-infrared dye indocyanine green.Proc. Natl Acad. Sci. USA115, 4465–4470 (2018)..

Ortsiefer, M. et al. Long-Wavelength VCSELs with Buried Tunnel Junction. in VCSELs: Fundamentals, Technology and Applications of Vertical-Cavity Surface-Emitting Lasers (ed Michalzik, R. ) 321–351 (Berlin: Springer, 2013).https://doi.org/10.1007/978-3-642-24986-0_10https://doi.org/10.1007/978-3-642-24986-0_10.

Mei, Y. et al. Quantum dot vertical-cavity surface-emitting lasers covering the 'green gap'.Light Sci. Appl.6, e16199 (2017)..

Yu, H. et al. Progress and prospects of GaN-based VCSEL from near UV to green emission.Prog. Quant. Electron.57, 1–19 (2018)..

Papatryfonos, K. et al. Refractive indices of MBE-grown AlxGa(1−x)As ternary alloys in the transparent wavelength region.AIP Adv.11, 025327 (2021)..

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

暂无数据